10/25/2012	10:04:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2012	10:04:25 AM	Recipe started at 10:04 AM
10/25/2012	10:04:25 AM	Helium valve closed
10/25/2012	10:04:25 AM	H2 valve closed
10/25/2012	10:04:25 AM	BCl3 valve closed
10/25/2012	10:04:25 AM	PH3 valve closed
10/25/2012	10:04:25 AM	SiCl4 pre valve closed
10/25/2012	10:04:25 AM	SiCl4 post valve closed
10/25/2012	10:04:25 AM	Main Vac valve closed
10/25/2012	10:04:25 AM	Bypass valve closed
10/25/2012	10:04:25 AM	Bubbler valve closed
10/25/2012	10:04:25 AM	Helium MFC set to  0.000000
10/25/2012	10:04:25 AM	H2 MFC set to  0.000000
10/25/2012	10:04:25 AM	BCl3 MFC set to  0.000000
10/25/2012	10:04:25 AM	PH3 MFC set to  0.000000
10/25/2012	10:04:25 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:04:25 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:04:25 AM	Tube furnace set to 0
10/25/2012	10:04:28 AM	H2 valve closed
10/25/2012	10:04:28 AM	BCl3 valve closed
10/25/2012	10:04:28 AM	PH3 valve closed
10/25/2012	10:04:28 AM	SiCl4 pre valve closed
10/25/2012	10:04:28 AM	SiCl4 post valve closed
10/25/2012	10:04:28 AM	Main Vac valve closed
10/25/2012	10:04:28 AM	Bypass valve closed
10/25/2012	10:04:28 AM	Bubbler valve closed
10/25/2012	10:04:28 AM	Helium valve opened
10/25/2012	10:04:28 AM	Helium MFC set to  500.000000
10/25/2012	10:04:28 AM	H2 MFC set to  0.000000
10/25/2012	10:04:28 AM	BCl3 MFC set to  0.000000
10/25/2012	10:04:28 AM	PH3 MFC set to  0.000000
10/25/2012	10:04:28 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:04:28 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:04:28 AM	Tube furnace set to 0
10/25/2012	10:05:26 AM	Helium valve closed
10/25/2012	10:05:26 AM	H2 valve closed
10/25/2012	10:05:26 AM	BCl3 valve closed
10/25/2012	10:05:26 AM	PH3 valve closed
10/25/2012	10:05:26 AM	SiCl4 pre valve closed
10/25/2012	10:05:26 AM	SiCl4 post valve closed
10/25/2012	10:05:26 AM	Main Vac valve closed
10/25/2012	10:05:26 AM	Bypass valve closed
10/25/2012	10:05:26 AM	Bubbler valve closed
10/25/2012	10:05:26 AM	Helium MFC set to  0.000000
10/25/2012	10:05:26 AM	H2 MFC set to  0.000000
10/25/2012	10:05:26 AM	BCl3 MFC set to  0.000000
10/25/2012	10:05:26 AM	PH3 MFC set to  0.000000
10/25/2012	10:05:26 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:05:26 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:05:26 AM	Tube furnace set to 0
10/25/2012	10:05:27 AM	Run finished at 10:05 AM
10/25/2012	10:05:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2012	10:11:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2012	10:11:40 AM	Recipe started at 10:11 AM
10/25/2012	10:11:40 AM	Helium valve closed
10/25/2012	10:11:40 AM	H2 valve closed
10/25/2012	10:11:40 AM	BCl3 valve closed
10/25/2012	10:11:40 AM	PH3 valve closed
10/25/2012	10:11:40 AM	SiCl4 pre valve closed
10/25/2012	10:11:40 AM	SiCl4 post valve closed
10/25/2012	10:11:40 AM	Main Vac valve closed
10/25/2012	10:11:40 AM	Bubbler valve closed
10/25/2012	10:11:40 AM	Bypass valve opened
10/25/2012	10:11:40 AM	Helium MFC set to  0.000000
10/25/2012	10:11:40 AM	H2 MFC set to  0.000000
10/25/2012	10:11:40 AM	BCl3 MFC set to  0.000000
10/25/2012	10:11:40 AM	PH3 MFC set to  0.000000
10/25/2012	10:11:40 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:11:40 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:11:40 AM	Tube furnace set to 0
10/25/2012	10:13:01 AM	Helium valve closed
10/25/2012	10:13:01 AM	H2 valve closed
10/25/2012	10:13:01 AM	BCl3 valve closed
10/25/2012	10:13:01 AM	PH3 valve closed
10/25/2012	10:13:01 AM	SiCl4 pre valve closed
10/25/2012	10:13:01 AM	SiCl4 post valve closed
10/25/2012	10:13:01 AM	Main Vac valve closed
10/25/2012	10:13:01 AM	Bubbler valve closed
10/25/2012	10:13:01 AM	Bypass valve opened
10/25/2012	10:13:01 AM	Helium MFC set to  0.000000
10/25/2012	10:13:01 AM	H2 MFC set to  0.000000
10/25/2012	10:13:01 AM	BCl3 MFC set to  0.000000
10/25/2012	10:13:01 AM	PH3 MFC set to  0.000000
10/25/2012	10:13:01 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:13:01 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:13:01 AM	Tube furnace set to 0
10/25/2012	10:14:01 AM	Helium valve closed
10/25/2012	10:14:01 AM	H2 valve closed
10/25/2012	10:14:01 AM	BCl3 valve closed
10/25/2012	10:14:01 AM	PH3 valve closed
10/25/2012	10:14:01 AM	SiCl4 pre valve closed
10/25/2012	10:14:01 AM	SiCl4 post valve closed
10/25/2012	10:14:01 AM	Bypass valve closed
10/25/2012	10:14:01 AM	Bubbler valve closed
10/25/2012	10:14:01 AM	Main Vac valve opened
10/25/2012	10:14:01 AM	Helium MFC set to  0.000000
10/25/2012	10:14:01 AM	H2 MFC set to  0.000000
10/25/2012	10:14:01 AM	BCl3 MFC set to  0.000000
10/25/2012	10:14:01 AM	PH3 MFC set to  0.000000
10/25/2012	10:14:01 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:14:01 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:14:02 AM	Tube furnace set to 0
10/25/2012	10:14:03 AM	Run finished at 10:14 AM
10/25/2012	10:14:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2012	10:15:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/25/2012	10:16:11 AM	Recipe started at 10:16 AM
10/25/2012	10:16:11 AM	Helium valve closed
10/25/2012	10:16:11 AM	H2 valve closed
10/25/2012	10:16:11 AM	BCl3 valve closed
10/25/2012	10:16:11 AM	PH3 valve closed
10/25/2012	10:16:11 AM	SiCl4 pre valve closed
10/25/2012	10:16:11 AM	SiCl4 post valve closed
10/25/2012	10:16:11 AM	Main Vac valve closed
10/25/2012	10:16:11 AM	Bubbler valve closed
10/25/2012	10:16:11 AM	Bypass valve opened
10/25/2012	10:16:11 AM	Helium MFC set to  0.000000
10/25/2012	10:16:11 AM	H2 MFC set to  0.000000
10/25/2012	10:16:11 AM	BCl3 MFC set to  0.000000
10/25/2012	10:16:11 AM	PH3 MFC set to  0.000000
10/25/2012	10:16:11 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:16:11 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:16:11 AM	Tube furnace set to 0
10/25/2012	10:16:11 AM	Helium valve closed
10/25/2012	10:16:11 AM	H2 valve closed
10/25/2012	10:16:11 AM	BCl3 valve closed
10/25/2012	10:16:11 AM	PH3 valve closed
10/25/2012	10:16:11 AM	SiCl4 pre valve closed
10/25/2012	10:16:11 AM	SiCl4 post valve closed
10/25/2012	10:16:11 AM	Main Vac valve closed
10/25/2012	10:16:11 AM	Bubbler valve closed
10/25/2012	10:16:11 AM	Bypass valve opened
10/25/2012	10:16:11 AM	Helium MFC set to  0.000000
10/25/2012	10:16:11 AM	H2 MFC set to  0.000000
10/25/2012	10:16:11 AM	BCl3 MFC set to  0.000000
10/25/2012	10:16:11 AM	PH3 MFC set to  0.000000
10/25/2012	10:16:11 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:16:11 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:16:11 AM	Tube furnace set to 0
10/25/2012	10:16:41 AM	Helium valve closed
10/25/2012	10:16:41 AM	H2 valve closed
10/25/2012	10:16:41 AM	BCl3 valve closed
10/25/2012	10:16:41 AM	PH3 valve closed
10/25/2012	10:16:41 AM	SiCl4 pre valve closed
10/25/2012	10:16:41 AM	SiCl4 post valve closed
10/25/2012	10:16:41 AM	Bypass valve closed
10/25/2012	10:16:41 AM	Bubbler valve closed
10/25/2012	10:16:41 AM	Main Vac valve opened
10/25/2012	10:16:41 AM	Helium MFC set to  0.000000
10/25/2012	10:16:41 AM	H2 MFC set to  0.000000
10/25/2012	10:16:41 AM	BCl3 MFC set to  0.000000
10/25/2012	10:16:41 AM	PH3 MFC set to  0.000000
10/25/2012	10:16:41 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:16:41 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:16:42 AM	Tube furnace set to 0
10/25/2012	10:17:12 AM	H2 valve closed
10/25/2012	10:17:12 AM	BCl3 valve closed
10/25/2012	10:17:12 AM	PH3 valve closed
10/25/2012	10:17:12 AM	SiCl4 pre valve closed
10/25/2012	10:17:12 AM	SiCl4 post valve closed
10/25/2012	10:17:12 AM	Bypass valve closed
10/25/2012	10:17:12 AM	Bubbler valve closed
10/25/2012	10:17:12 AM	Helium valve opened
10/25/2012	10:17:12 AM	Main Vac valve opened
10/25/2012	10:17:12 AM	Helium MFC set to  20.000000
10/25/2012	10:17:12 AM	H2 MFC set to  0.000000
10/25/2012	10:17:12 AM	BCl3 MFC set to  0.000000
10/25/2012	10:17:12 AM	PH3 MFC set to  0.000000
10/25/2012	10:17:12 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:17:12 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:17:12 AM	Tube furnace set to 0
10/25/2012	10:17:42 AM	Helium valve closed
10/25/2012	10:17:42 AM	H2 valve closed
10/25/2012	10:17:42 AM	BCl3 valve closed
10/25/2012	10:17:42 AM	PH3 valve closed
10/25/2012	10:17:42 AM	SiCl4 pre valve closed
10/25/2012	10:17:42 AM	SiCl4 post valve closed
10/25/2012	10:17:42 AM	Bypass valve closed
10/25/2012	10:17:42 AM	Bubbler valve closed
10/25/2012	10:17:42 AM	Main Vac valve opened
10/25/2012	10:17:42 AM	Helium MFC set to  0.000000
10/25/2012	10:17:42 AM	H2 MFC set to  0.000000
10/25/2012	10:17:42 AM	BCl3 MFC set to  0.000000
10/25/2012	10:17:42 AM	PH3 MFC set to  0.000000
10/25/2012	10:17:42 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:17:42 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:17:42 AM	Tube furnace set to 0
10/25/2012	10:18:12 AM	H2 valve closed
10/25/2012	10:18:12 AM	BCl3 valve closed
10/25/2012	10:18:12 AM	PH3 valve closed
10/25/2012	10:18:12 AM	SiCl4 pre valve closed
10/25/2012	10:18:12 AM	SiCl4 post valve closed
10/25/2012	10:18:12 AM	Bypass valve closed
10/25/2012	10:18:12 AM	Bubbler valve closed
10/25/2012	10:18:12 AM	Helium valve opened
10/25/2012	10:18:12 AM	Main Vac valve opened
10/25/2012	10:18:12 AM	Helium MFC set to  20.000000
10/25/2012	10:18:12 AM	H2 MFC set to  0.000000
10/25/2012	10:18:12 AM	BCl3 MFC set to  0.000000
10/25/2012	10:18:12 AM	PH3 MFC set to  0.000000
10/25/2012	10:18:12 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:18:12 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:18:12 AM	Tube furnace set to 0
10/25/2012	10:18:42 AM	Helium valve closed
10/25/2012	10:18:42 AM	H2 valve closed
10/25/2012	10:18:42 AM	BCl3 valve closed
10/25/2012	10:18:42 AM	PH3 valve closed
10/25/2012	10:18:42 AM	SiCl4 pre valve closed
10/25/2012	10:18:42 AM	SiCl4 post valve closed
10/25/2012	10:18:42 AM	Bypass valve closed
10/25/2012	10:18:42 AM	Bubbler valve closed
10/25/2012	10:18:42 AM	Main Vac valve opened
10/25/2012	10:18:42 AM	Helium MFC set to  0.000000
10/25/2012	10:18:42 AM	H2 MFC set to  0.000000
10/25/2012	10:18:42 AM	BCl3 MFC set to  0.000000
10/25/2012	10:18:42 AM	PH3 MFC set to  0.000000
10/25/2012	10:18:42 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:18:42 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:18:43 AM	Tube furnace set to 0
10/25/2012	10:19:13 AM	H2 valve closed
10/25/2012	10:19:13 AM	BCl3 valve closed
10/25/2012	10:19:13 AM	PH3 valve closed
10/25/2012	10:19:13 AM	SiCl4 pre valve closed
10/25/2012	10:19:13 AM	SiCl4 post valve closed
10/25/2012	10:19:13 AM	Bypass valve closed
10/25/2012	10:19:13 AM	Bubbler valve closed
10/25/2012	10:19:13 AM	Helium valve opened
10/25/2012	10:19:13 AM	Main Vac valve opened
10/25/2012	10:19:13 AM	Helium MFC set to  20.000000
10/25/2012	10:19:13 AM	H2 MFC set to  0.000000
10/25/2012	10:19:13 AM	BCl3 MFC set to  0.000000
10/25/2012	10:19:13 AM	PH3 MFC set to  0.000000
10/25/2012	10:19:13 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:19:13 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:19:13 AM	Tube furnace set to 0
10/25/2012	10:19:43 AM	Helium valve closed
10/25/2012	10:19:43 AM	H2 valve closed
10/25/2012	10:19:43 AM	BCl3 valve closed
10/25/2012	10:19:43 AM	PH3 valve closed
10/25/2012	10:19:43 AM	SiCl4 pre valve closed
10/25/2012	10:19:43 AM	SiCl4 post valve closed
10/25/2012	10:19:43 AM	Bypass valve closed
10/25/2012	10:19:43 AM	Bubbler valve closed
10/25/2012	10:19:43 AM	Main Vac valve opened
10/25/2012	10:19:43 AM	Helium MFC set to  0.000000
10/25/2012	10:19:43 AM	H2 MFC set to  0.000000
10/25/2012	10:19:43 AM	BCl3 MFC set to  0.000000
10/25/2012	10:19:43 AM	PH3 MFC set to  0.000000
10/25/2012	10:19:43 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:19:43 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:19:43 AM	Tube furnace set to 0
10/25/2012	10:20:13 AM	H2 valve closed
10/25/2012	10:20:13 AM	BCl3 valve closed
10/25/2012	10:20:13 AM	PH3 valve closed
10/25/2012	10:20:13 AM	SiCl4 pre valve closed
10/25/2012	10:20:13 AM	SiCl4 post valve closed
10/25/2012	10:20:13 AM	Bypass valve closed
10/25/2012	10:20:13 AM	Bubbler valve closed
10/25/2012	10:20:13 AM	Helium valve opened
10/25/2012	10:20:13 AM	Main Vac valve opened
10/25/2012	10:20:13 AM	Helium MFC set to  20.000000
10/25/2012	10:20:13 AM	H2 MFC set to  0.000000
10/25/2012	10:20:13 AM	BCl3 MFC set to  0.000000
10/25/2012	10:20:13 AM	PH3 MFC set to  0.000000
10/25/2012	10:20:13 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:20:13 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:20:13 AM	Tube furnace set to 0
10/25/2012	10:20:43 AM	Helium valve closed
10/25/2012	10:20:43 AM	H2 valve closed
10/25/2012	10:20:43 AM	BCl3 valve closed
10/25/2012	10:20:43 AM	PH3 valve closed
10/25/2012	10:20:43 AM	SiCl4 pre valve closed
10/25/2012	10:20:43 AM	SiCl4 post valve closed
10/25/2012	10:20:43 AM	Bypass valve closed
10/25/2012	10:20:43 AM	Bubbler valve closed
10/25/2012	10:20:43 AM	Main Vac valve opened
10/25/2012	10:20:43 AM	Helium MFC set to  0.000000
10/25/2012	10:20:43 AM	H2 MFC set to  0.000000
10/25/2012	10:20:43 AM	BCl3 MFC set to  0.000000
10/25/2012	10:20:43 AM	PH3 MFC set to  0.000000
10/25/2012	10:20:43 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:20:43 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:20:44 AM	Tube furnace set to 0
10/25/2012	10:21:14 AM	H2 valve closed
10/25/2012	10:21:14 AM	BCl3 valve closed
10/25/2012	10:21:14 AM	PH3 valve closed
10/25/2012	10:21:14 AM	SiCl4 pre valve closed
10/25/2012	10:21:14 AM	SiCl4 post valve closed
10/25/2012	10:21:14 AM	Bypass valve closed
10/25/2012	10:21:14 AM	Bubbler valve closed
10/25/2012	10:21:14 AM	Helium valve opened
10/25/2012	10:21:14 AM	Main Vac valve opened
10/25/2012	10:21:14 AM	Helium MFC set to  20.000000
10/25/2012	10:21:14 AM	H2 MFC set to  0.000000
10/25/2012	10:21:14 AM	BCl3 MFC set to  0.000000
10/25/2012	10:21:14 AM	PH3 MFC set to  0.000000
10/25/2012	10:21:14 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:21:14 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:21:14 AM	Tube furnace set to 0
10/25/2012	10:21:44 AM	Helium valve closed
10/25/2012	10:21:44 AM	H2 valve closed
10/25/2012	10:21:44 AM	BCl3 valve closed
10/25/2012	10:21:44 AM	PH3 valve closed
10/25/2012	10:21:44 AM	SiCl4 pre valve closed
10/25/2012	10:21:44 AM	SiCl4 post valve closed
10/25/2012	10:21:44 AM	Bypass valve closed
10/25/2012	10:21:44 AM	Bubbler valve closed
10/25/2012	10:21:44 AM	Main Vac valve opened
10/25/2012	10:21:44 AM	Helium MFC set to  0.000000
10/25/2012	10:21:44 AM	H2 MFC set to  0.000000
10/25/2012	10:21:44 AM	BCl3 MFC set to  0.000000
10/25/2012	10:21:44 AM	PH3 MFC set to  0.000000
10/25/2012	10:21:44 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:21:44 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:21:44 AM	Tube furnace set to 0
10/25/2012	10:22:14 AM	H2 valve closed
10/25/2012	10:22:14 AM	BCl3 valve closed
10/25/2012	10:22:14 AM	PH3 valve closed
10/25/2012	10:22:14 AM	SiCl4 pre valve closed
10/25/2012	10:22:14 AM	SiCl4 post valve closed
10/25/2012	10:22:14 AM	Bypass valve closed
10/25/2012	10:22:14 AM	Bubbler valve closed
10/25/2012	10:22:14 AM	Helium valve opened
10/25/2012	10:22:14 AM	Main Vac valve opened
10/25/2012	10:22:14 AM	Helium MFC set to  20.000000
10/25/2012	10:22:14 AM	H2 MFC set to  0.000000
10/25/2012	10:22:14 AM	BCl3 MFC set to  0.000000
10/25/2012	10:22:14 AM	PH3 MFC set to  0.000000
10/25/2012	10:22:14 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:22:14 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:22:14 AM	Tube furnace set to 0
10/25/2012	10:22:44 AM	Helium valve closed
10/25/2012	10:22:44 AM	H2 valve closed
10/25/2012	10:22:44 AM	BCl3 valve closed
10/25/2012	10:22:44 AM	PH3 valve closed
10/25/2012	10:22:44 AM	SiCl4 pre valve closed
10/25/2012	10:22:44 AM	SiCl4 post valve closed
10/25/2012	10:22:44 AM	Bypass valve closed
10/25/2012	10:22:44 AM	Bubbler valve closed
10/25/2012	10:22:44 AM	Main Vac valve opened
10/25/2012	10:22:44 AM	Helium MFC set to  0.000000
10/25/2012	10:22:44 AM	H2 MFC set to  0.000000
10/25/2012	10:22:44 AM	BCl3 MFC set to  0.000000
10/25/2012	10:22:44 AM	PH3 MFC set to  0.000000
10/25/2012	10:22:44 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:22:44 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:22:45 AM	Tube furnace set to 0
10/25/2012	10:23:15 AM	H2 valve closed
10/25/2012	10:23:15 AM	BCl3 valve closed
10/25/2012	10:23:15 AM	PH3 valve closed
10/25/2012	10:23:15 AM	SiCl4 pre valve closed
10/25/2012	10:23:15 AM	SiCl4 post valve closed
10/25/2012	10:23:15 AM	Bypass valve closed
10/25/2012	10:23:15 AM	Bubbler valve closed
10/25/2012	10:23:15 AM	Helium valve opened
10/25/2012	10:23:15 AM	Main Vac valve opened
10/25/2012	10:23:15 AM	Helium MFC set to  20.000000
10/25/2012	10:23:15 AM	H2 MFC set to  0.000000
10/25/2012	10:23:15 AM	BCl3 MFC set to  0.000000
10/25/2012	10:23:15 AM	PH3 MFC set to  0.000000
10/25/2012	10:23:15 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:23:15 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:23:15 AM	Tube furnace set to 0
10/25/2012	10:23:45 AM	Helium valve closed
10/25/2012	10:23:45 AM	H2 valve closed
10/25/2012	10:23:45 AM	BCl3 valve closed
10/25/2012	10:23:45 AM	PH3 valve closed
10/25/2012	10:23:45 AM	SiCl4 pre valve closed
10/25/2012	10:23:45 AM	SiCl4 post valve closed
10/25/2012	10:23:45 AM	Bypass valve closed
10/25/2012	10:23:45 AM	Bubbler valve closed
10/25/2012	10:23:45 AM	Main Vac valve opened
10/25/2012	10:23:45 AM	Helium MFC set to  0.000000
10/25/2012	10:23:45 AM	H2 MFC set to  0.000000
10/25/2012	10:23:45 AM	BCl3 MFC set to  0.000000
10/25/2012	10:23:45 AM	PH3 MFC set to  0.000000
10/25/2012	10:23:45 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:23:45 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:23:45 AM	Tube furnace set to 0
10/25/2012	10:24:15 AM	H2 valve closed
10/25/2012	10:24:15 AM	BCl3 valve closed
10/25/2012	10:24:15 AM	PH3 valve closed
10/25/2012	10:24:15 AM	SiCl4 pre valve closed
10/25/2012	10:24:15 AM	SiCl4 post valve closed
10/25/2012	10:24:15 AM	Bypass valve closed
10/25/2012	10:24:15 AM	Bubbler valve closed
10/25/2012	10:24:15 AM	Helium valve opened
10/25/2012	10:24:15 AM	Main Vac valve opened
10/25/2012	10:24:15 AM	Helium MFC set to  20.000000
10/25/2012	10:24:15 AM	H2 MFC set to  0.000000
10/25/2012	10:24:15 AM	BCl3 MFC set to  0.000000
10/25/2012	10:24:15 AM	PH3 MFC set to  0.000000
10/25/2012	10:24:15 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:24:15 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:24:15 AM	Tube furnace set to 0
10/25/2012	10:24:45 AM	Helium valve closed
10/25/2012	10:24:45 AM	H2 valve closed
10/25/2012	10:24:45 AM	BCl3 valve closed
10/25/2012	10:24:45 AM	PH3 valve closed
10/25/2012	10:24:45 AM	SiCl4 pre valve closed
10/25/2012	10:24:45 AM	SiCl4 post valve closed
10/25/2012	10:24:45 AM	Bypass valve closed
10/25/2012	10:24:45 AM	Bubbler valve closed
10/25/2012	10:24:45 AM	Main Vac valve opened
10/25/2012	10:24:45 AM	Helium MFC set to  0.000000
10/25/2012	10:24:45 AM	H2 MFC set to  0.000000
10/25/2012	10:24:45 AM	BCl3 MFC set to  0.000000
10/25/2012	10:24:45 AM	PH3 MFC set to  0.000000
10/25/2012	10:24:45 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:24:45 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:24:46 AM	Tube furnace set to 0
10/25/2012	10:25:16 AM	H2 valve closed
10/25/2012	10:25:16 AM	BCl3 valve closed
10/25/2012	10:25:16 AM	PH3 valve closed
10/25/2012	10:25:16 AM	SiCl4 pre valve closed
10/25/2012	10:25:16 AM	SiCl4 post valve closed
10/25/2012	10:25:16 AM	Bypass valve closed
10/25/2012	10:25:16 AM	Bubbler valve closed
10/25/2012	10:25:16 AM	Helium valve opened
10/25/2012	10:25:16 AM	Main Vac valve opened
10/25/2012	10:25:16 AM	Helium MFC set to  20.000000
10/25/2012	10:25:16 AM	H2 MFC set to  0.000000
10/25/2012	10:25:16 AM	BCl3 MFC set to  0.000000
10/25/2012	10:25:16 AM	PH3 MFC set to  0.000000
10/25/2012	10:25:16 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:25:16 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:25:16 AM	Tube furnace set to 0
10/25/2012	10:25:46 AM	Helium valve closed
10/25/2012	10:25:46 AM	H2 valve closed
10/25/2012	10:25:46 AM	BCl3 valve closed
10/25/2012	10:25:46 AM	PH3 valve closed
10/25/2012	10:25:46 AM	SiCl4 pre valve closed
10/25/2012	10:25:46 AM	SiCl4 post valve closed
10/25/2012	10:25:46 AM	Bypass valve closed
10/25/2012	10:25:46 AM	Bubbler valve closed
10/25/2012	10:25:46 AM	Main Vac valve opened
10/25/2012	10:25:46 AM	Helium MFC set to  0.000000
10/25/2012	10:25:46 AM	H2 MFC set to  0.000000
10/25/2012	10:25:46 AM	BCl3 MFC set to  0.000000
10/25/2012	10:25:46 AM	PH3 MFC set to  0.000000
10/25/2012	10:25:46 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:25:46 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:25:46 AM	Tube furnace set to 0
10/25/2012	10:26:16 AM	H2 valve closed
10/25/2012	10:26:16 AM	BCl3 valve closed
10/25/2012	10:26:16 AM	PH3 valve closed
10/25/2012	10:26:16 AM	SiCl4 pre valve closed
10/25/2012	10:26:16 AM	SiCl4 post valve closed
10/25/2012	10:26:16 AM	Bypass valve closed
10/25/2012	10:26:16 AM	Bubbler valve closed
10/25/2012	10:26:16 AM	Helium valve opened
10/25/2012	10:26:16 AM	Main Vac valve opened
10/25/2012	10:26:16 AM	Helium MFC set to  20.000000
10/25/2012	10:26:16 AM	H2 MFC set to  0.000000
10/25/2012	10:26:16 AM	BCl3 MFC set to  0.000000
10/25/2012	10:26:16 AM	PH3 MFC set to  0.000000
10/25/2012	10:26:16 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:26:16 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:26:16 AM	Tube furnace set to 0
10/25/2012	10:26:46 AM	Helium valve closed
10/25/2012	10:26:46 AM	H2 valve closed
10/25/2012	10:26:46 AM	BCl3 valve closed
10/25/2012	10:26:46 AM	PH3 valve closed
10/25/2012	10:26:46 AM	SiCl4 pre valve closed
10/25/2012	10:26:46 AM	SiCl4 post valve closed
10/25/2012	10:26:46 AM	Bypass valve closed
10/25/2012	10:26:46 AM	Bubbler valve closed
10/25/2012	10:26:46 AM	Main Vac valve opened
10/25/2012	10:26:46 AM	Helium MFC set to  0.000000
10/25/2012	10:26:46 AM	H2 MFC set to  0.000000
10/25/2012	10:26:46 AM	BCl3 MFC set to  0.000000
10/25/2012	10:26:46 AM	PH3 MFC set to  0.000000
10/25/2012	10:26:46 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:26:46 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:26:47 AM	Tube furnace set to 0
10/25/2012	10:26:48 AM	Run finished at 10:26 AM
10/25/2012	10:26:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/25/2012	10:28:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2012	10:28:49 AM	Recipe started at 10:28 AM
10/25/2012	10:28:49 AM	Helium valve closed
10/25/2012	10:28:49 AM	H2 valve closed
10/25/2012	10:28:49 AM	BCl3 valve closed
10/25/2012	10:28:49 AM	PH3 valve closed
10/25/2012	10:28:49 AM	SiCl4 pre valve closed
10/25/2012	10:28:49 AM	SiCl4 post valve closed
10/25/2012	10:28:49 AM	Main Vac valve closed
10/25/2012	10:28:49 AM	Bypass valve closed
10/25/2012	10:28:49 AM	Bubbler valve closed
10/25/2012	10:28:49 AM	Helium MFC set to  0.000000
10/25/2012	10:28:49 AM	H2 MFC set to  0.000000
10/25/2012	10:28:49 AM	BCl3 MFC set to  0.000000
10/25/2012	10:28:49 AM	PH3 MFC set to  0.000000
10/25/2012	10:28:49 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:28:49 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:28:49 AM	Tube furnace set to 0
10/25/2012	10:28:52 AM	H2 valve closed
10/25/2012	10:28:52 AM	BCl3 valve closed
10/25/2012	10:28:52 AM	PH3 valve closed
10/25/2012	10:28:52 AM	SiCl4 pre valve closed
10/25/2012	10:28:52 AM	SiCl4 post valve closed
10/25/2012	10:28:52 AM	Main Vac valve closed
10/25/2012	10:28:52 AM	Bypass valve closed
10/25/2012	10:28:52 AM	Bubbler valve closed
10/25/2012	10:28:52 AM	Helium valve opened
10/25/2012	10:28:53 AM	Helium MFC set to  500.000000
10/25/2012	10:28:53 AM	H2 MFC set to  0.000000
10/25/2012	10:28:53 AM	BCl3 MFC set to  0.000000
10/25/2012	10:28:53 AM	PH3 MFC set to  0.000000
10/25/2012	10:28:53 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:28:53 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:28:53 AM	Tube furnace set to 0
10/25/2012	10:30:06 AM	Helium valve closed
10/25/2012	10:30:06 AM	H2 valve closed
10/25/2012	10:30:06 AM	BCl3 valve closed
10/25/2012	10:30:06 AM	PH3 valve closed
10/25/2012	10:30:06 AM	SiCl4 pre valve closed
10/25/2012	10:30:06 AM	SiCl4 post valve closed
10/25/2012	10:30:06 AM	Main Vac valve closed
10/25/2012	10:30:06 AM	Bypass valve closed
10/25/2012	10:30:06 AM	Bubbler valve closed
10/25/2012	10:30:06 AM	Helium MFC set to  0.000000
10/25/2012	10:30:06 AM	H2 MFC set to  0.000000
10/25/2012	10:30:06 AM	BCl3 MFC set to  0.000000
10/25/2012	10:30:06 AM	PH3 MFC set to  0.000000
10/25/2012	10:30:06 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:30:06 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:30:06 AM	Tube furnace set to 0
10/25/2012	10:30:07 AM	Run finished at 10:30 AM
10/25/2012	10:30:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2012	10:33:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2012	10:33:56 AM	Recipe started at 10:33 AM
10/25/2012	10:33:56 AM	Helium valve closed
10/25/2012	10:33:56 AM	H2 valve closed
10/25/2012	10:33:56 AM	BCl3 valve closed
10/25/2012	10:33:56 AM	PH3 valve closed
10/25/2012	10:33:56 AM	SiCl4 pre valve closed
10/25/2012	10:33:56 AM	SiCl4 post valve closed
10/25/2012	10:33:56 AM	Main Vac valve closed
10/25/2012	10:33:56 AM	Bubbler valve closed
10/25/2012	10:33:56 AM	Bypass valve opened
10/25/2012	10:33:56 AM	Helium MFC set to  0.000000
10/25/2012	10:33:56 AM	H2 MFC set to  0.000000
10/25/2012	10:33:56 AM	BCl3 MFC set to  0.000000
10/25/2012	10:33:56 AM	PH3 MFC set to  0.000000
10/25/2012	10:33:56 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:33:56 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:33:57 AM	Tube furnace set to 0
10/25/2012	10:35:20 AM	Helium valve closed
10/25/2012	10:35:20 AM	H2 valve closed
10/25/2012	10:35:20 AM	BCl3 valve closed
10/25/2012	10:35:20 AM	PH3 valve closed
10/25/2012	10:35:20 AM	SiCl4 pre valve closed
10/25/2012	10:35:20 AM	SiCl4 post valve closed
10/25/2012	10:35:20 AM	Main Vac valve closed
10/25/2012	10:35:20 AM	Bubbler valve closed
10/25/2012	10:35:20 AM	Bypass valve opened
10/25/2012	10:35:20 AM	Helium MFC set to  0.000000
10/25/2012	10:35:20 AM	H2 MFC set to  0.000000
10/25/2012	10:35:20 AM	BCl3 MFC set to  0.000000
10/25/2012	10:35:20 AM	PH3 MFC set to  0.000000
10/25/2012	10:35:20 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:35:20 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:35:20 AM	Tube furnace set to 0
10/25/2012	10:36:20 AM	Helium valve closed
10/25/2012	10:36:20 AM	H2 valve closed
10/25/2012	10:36:20 AM	BCl3 valve closed
10/25/2012	10:36:20 AM	PH3 valve closed
10/25/2012	10:36:20 AM	SiCl4 pre valve closed
10/25/2012	10:36:20 AM	SiCl4 post valve closed
10/25/2012	10:36:20 AM	Bypass valve closed
10/25/2012	10:36:20 AM	Bubbler valve closed
10/25/2012	10:36:20 AM	Main Vac valve opened
10/25/2012	10:36:20 AM	Helium MFC set to  0.000000
10/25/2012	10:36:20 AM	H2 MFC set to  0.000000
10/25/2012	10:36:20 AM	BCl3 MFC set to  0.000000
10/25/2012	10:36:20 AM	PH3 MFC set to  0.000000
10/25/2012	10:36:20 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:36:20 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:36:20 AM	Tube furnace set to 0
10/25/2012	10:36:21 AM	Run finished at 10:36 AM
10/25/2012	10:36:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2012	10:39:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/25/2012	10:39:16 AM	Recipe started at 10:39 AM
10/25/2012	10:39:16 AM	Helium valve closed
10/25/2012	10:39:16 AM	H2 valve closed
10/25/2012	10:39:16 AM	BCl3 valve closed
10/25/2012	10:39:16 AM	PH3 valve closed
10/25/2012	10:39:16 AM	SiCl4 pre valve closed
10/25/2012	10:39:16 AM	SiCl4 post valve closed
10/25/2012	10:39:16 AM	Main Vac valve closed
10/25/2012	10:39:16 AM	Bubbler valve closed
10/25/2012	10:39:16 AM	Bypass valve opened
10/25/2012	10:39:16 AM	Helium MFC set to  0.000000
10/25/2012	10:39:16 AM	H2 MFC set to  0.000000
10/25/2012	10:39:16 AM	BCl3 MFC set to  0.000000
10/25/2012	10:39:16 AM	PH3 MFC set to  0.000000
10/25/2012	10:39:16 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:39:16 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:39:16 AM	Tube furnace set to 0
10/25/2012	10:39:16 AM	Helium valve closed
10/25/2012	10:39:16 AM	H2 valve closed
10/25/2012	10:39:16 AM	BCl3 valve closed
10/25/2012	10:39:16 AM	PH3 valve closed
10/25/2012	10:39:16 AM	SiCl4 pre valve closed
10/25/2012	10:39:16 AM	SiCl4 post valve closed
10/25/2012	10:39:16 AM	Main Vac valve closed
10/25/2012	10:39:16 AM	Bubbler valve closed
10/25/2012	10:39:16 AM	Bypass valve opened
10/25/2012	10:39:16 AM	Helium MFC set to  0.000000
10/25/2012	10:39:16 AM	H2 MFC set to  0.000000
10/25/2012	10:39:16 AM	BCl3 MFC set to  0.000000
10/25/2012	10:39:16 AM	PH3 MFC set to  0.000000
10/25/2012	10:39:16 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:39:16 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:39:17 AM	Tube furnace set to 0
10/25/2012	10:39:47 AM	Helium valve closed
10/25/2012	10:39:47 AM	H2 valve closed
10/25/2012	10:39:47 AM	BCl3 valve closed
10/25/2012	10:39:47 AM	PH3 valve closed
10/25/2012	10:39:47 AM	SiCl4 pre valve closed
10/25/2012	10:39:47 AM	SiCl4 post valve closed
10/25/2012	10:39:47 AM	Bypass valve closed
10/25/2012	10:39:47 AM	Bubbler valve closed
10/25/2012	10:39:47 AM	Main Vac valve opened
10/25/2012	10:39:47 AM	Helium MFC set to  0.000000
10/25/2012	10:39:47 AM	H2 MFC set to  0.000000
10/25/2012	10:39:47 AM	BCl3 MFC set to  0.000000
10/25/2012	10:39:47 AM	PH3 MFC set to  0.000000
10/25/2012	10:39:47 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:39:47 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:39:47 AM	Tube furnace set to 0
10/25/2012	10:40:17 AM	H2 valve closed
10/25/2012	10:40:17 AM	BCl3 valve closed
10/25/2012	10:40:17 AM	PH3 valve closed
10/25/2012	10:40:17 AM	SiCl4 pre valve closed
10/25/2012	10:40:17 AM	SiCl4 post valve closed
10/25/2012	10:40:17 AM	Bypass valve closed
10/25/2012	10:40:17 AM	Bubbler valve closed
10/25/2012	10:40:17 AM	Helium valve opened
10/25/2012	10:40:17 AM	Main Vac valve opened
10/25/2012	10:40:17 AM	Helium MFC set to  20.000000
10/25/2012	10:40:17 AM	H2 MFC set to  0.000000
10/25/2012	10:40:17 AM	BCl3 MFC set to  0.000000
10/25/2012	10:40:17 AM	PH3 MFC set to  0.000000
10/25/2012	10:40:17 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:40:17 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:40:17 AM	Tube furnace set to 0
10/25/2012	10:40:47 AM	Helium valve closed
10/25/2012	10:40:47 AM	H2 valve closed
10/25/2012	10:40:47 AM	BCl3 valve closed
10/25/2012	10:40:47 AM	PH3 valve closed
10/25/2012	10:40:47 AM	SiCl4 pre valve closed
10/25/2012	10:40:47 AM	SiCl4 post valve closed
10/25/2012	10:40:47 AM	Bypass valve closed
10/25/2012	10:40:47 AM	Bubbler valve closed
10/25/2012	10:40:47 AM	Main Vac valve opened
10/25/2012	10:40:47 AM	Helium MFC set to  0.000000
10/25/2012	10:40:47 AM	H2 MFC set to  0.000000
10/25/2012	10:40:47 AM	BCl3 MFC set to  0.000000
10/25/2012	10:40:47 AM	PH3 MFC set to  0.000000
10/25/2012	10:40:47 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:40:47 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:40:47 AM	Tube furnace set to 0
10/25/2012	10:41:17 AM	H2 valve closed
10/25/2012	10:41:17 AM	BCl3 valve closed
10/25/2012	10:41:17 AM	PH3 valve closed
10/25/2012	10:41:17 AM	SiCl4 pre valve closed
10/25/2012	10:41:17 AM	SiCl4 post valve closed
10/25/2012	10:41:17 AM	Bypass valve closed
10/25/2012	10:41:17 AM	Bubbler valve closed
10/25/2012	10:41:17 AM	Helium valve opened
10/25/2012	10:41:17 AM	Main Vac valve opened
10/25/2012	10:41:17 AM	Helium MFC set to  20.000000
10/25/2012	10:41:17 AM	H2 MFC set to  0.000000
10/25/2012	10:41:17 AM	BCl3 MFC set to  0.000000
10/25/2012	10:41:17 AM	PH3 MFC set to  0.000000
10/25/2012	10:41:17 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:41:17 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:41:18 AM	Tube furnace set to 0
10/25/2012	10:41:48 AM	Helium valve closed
10/25/2012	10:41:48 AM	H2 valve closed
10/25/2012	10:41:48 AM	BCl3 valve closed
10/25/2012	10:41:48 AM	PH3 valve closed
10/25/2012	10:41:48 AM	SiCl4 pre valve closed
10/25/2012	10:41:48 AM	SiCl4 post valve closed
10/25/2012	10:41:48 AM	Bypass valve closed
10/25/2012	10:41:48 AM	Bubbler valve closed
10/25/2012	10:41:48 AM	Main Vac valve opened
10/25/2012	10:41:48 AM	Helium MFC set to  0.000000
10/25/2012	10:41:48 AM	H2 MFC set to  0.000000
10/25/2012	10:41:48 AM	BCl3 MFC set to  0.000000
10/25/2012	10:41:48 AM	PH3 MFC set to  0.000000
10/25/2012	10:41:48 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:41:48 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:41:48 AM	Tube furnace set to 0
10/25/2012	10:42:18 AM	H2 valve closed
10/25/2012	10:42:18 AM	BCl3 valve closed
10/25/2012	10:42:18 AM	PH3 valve closed
10/25/2012	10:42:18 AM	SiCl4 pre valve closed
10/25/2012	10:42:18 AM	SiCl4 post valve closed
10/25/2012	10:42:18 AM	Bypass valve closed
10/25/2012	10:42:18 AM	Bubbler valve closed
10/25/2012	10:42:18 AM	Helium valve opened
10/25/2012	10:42:18 AM	Main Vac valve opened
10/25/2012	10:42:18 AM	Helium MFC set to  20.000000
10/25/2012	10:42:18 AM	H2 MFC set to  0.000000
10/25/2012	10:42:18 AM	BCl3 MFC set to  0.000000
10/25/2012	10:42:18 AM	PH3 MFC set to  0.000000
10/25/2012	10:42:18 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:42:18 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:42:18 AM	Tube furnace set to 0
10/25/2012	10:42:48 AM	Helium valve closed
10/25/2012	10:42:48 AM	H2 valve closed
10/25/2012	10:42:48 AM	BCl3 valve closed
10/25/2012	10:42:48 AM	PH3 valve closed
10/25/2012	10:42:48 AM	SiCl4 pre valve closed
10/25/2012	10:42:48 AM	SiCl4 post valve closed
10/25/2012	10:42:48 AM	Bypass valve closed
10/25/2012	10:42:48 AM	Bubbler valve closed
10/25/2012	10:42:48 AM	Main Vac valve opened
10/25/2012	10:42:48 AM	Helium MFC set to  0.000000
10/25/2012	10:42:48 AM	H2 MFC set to  0.000000
10/25/2012	10:42:48 AM	BCl3 MFC set to  0.000000
10/25/2012	10:42:48 AM	PH3 MFC set to  0.000000
10/25/2012	10:42:48 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:42:48 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:42:48 AM	Tube furnace set to 0
10/25/2012	10:43:18 AM	H2 valve closed
10/25/2012	10:43:18 AM	BCl3 valve closed
10/25/2012	10:43:18 AM	PH3 valve closed
10/25/2012	10:43:18 AM	SiCl4 pre valve closed
10/25/2012	10:43:18 AM	SiCl4 post valve closed
10/25/2012	10:43:18 AM	Bypass valve closed
10/25/2012	10:43:18 AM	Bubbler valve closed
10/25/2012	10:43:18 AM	Helium valve opened
10/25/2012	10:43:18 AM	Main Vac valve opened
10/25/2012	10:43:18 AM	Helium MFC set to  20.000000
10/25/2012	10:43:18 AM	H2 MFC set to  0.000000
10/25/2012	10:43:18 AM	BCl3 MFC set to  0.000000
10/25/2012	10:43:18 AM	PH3 MFC set to  0.000000
10/25/2012	10:43:18 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:43:18 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:43:19 AM	Tube furnace set to 0
10/25/2012	10:43:49 AM	Helium valve closed
10/25/2012	10:43:49 AM	H2 valve closed
10/25/2012	10:43:49 AM	BCl3 valve closed
10/25/2012	10:43:49 AM	PH3 valve closed
10/25/2012	10:43:49 AM	SiCl4 pre valve closed
10/25/2012	10:43:49 AM	SiCl4 post valve closed
10/25/2012	10:43:49 AM	Bypass valve closed
10/25/2012	10:43:49 AM	Bubbler valve closed
10/25/2012	10:43:49 AM	Main Vac valve opened
10/25/2012	10:43:49 AM	Helium MFC set to  0.000000
10/25/2012	10:43:49 AM	H2 MFC set to  0.000000
10/25/2012	10:43:49 AM	BCl3 MFC set to  0.000000
10/25/2012	10:43:49 AM	PH3 MFC set to  0.000000
10/25/2012	10:43:49 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:43:49 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:43:49 AM	Tube furnace set to 0
10/25/2012	10:44:19 AM	H2 valve closed
10/25/2012	10:44:19 AM	BCl3 valve closed
10/25/2012	10:44:19 AM	PH3 valve closed
10/25/2012	10:44:19 AM	SiCl4 pre valve closed
10/25/2012	10:44:19 AM	SiCl4 post valve closed
10/25/2012	10:44:19 AM	Bypass valve closed
10/25/2012	10:44:19 AM	Bubbler valve closed
10/25/2012	10:44:19 AM	Helium valve opened
10/25/2012	10:44:19 AM	Main Vac valve opened
10/25/2012	10:44:19 AM	Helium MFC set to  20.000000
10/25/2012	10:44:19 AM	H2 MFC set to  0.000000
10/25/2012	10:44:19 AM	BCl3 MFC set to  0.000000
10/25/2012	10:44:19 AM	PH3 MFC set to  0.000000
10/25/2012	10:44:19 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:44:19 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:44:19 AM	Tube furnace set to 0
10/25/2012	10:44:49 AM	Helium valve closed
10/25/2012	10:44:49 AM	H2 valve closed
10/25/2012	10:44:49 AM	BCl3 valve closed
10/25/2012	10:44:49 AM	PH3 valve closed
10/25/2012	10:44:49 AM	SiCl4 pre valve closed
10/25/2012	10:44:49 AM	SiCl4 post valve closed
10/25/2012	10:44:49 AM	Bypass valve closed
10/25/2012	10:44:49 AM	Bubbler valve closed
10/25/2012	10:44:49 AM	Main Vac valve opened
10/25/2012	10:44:49 AM	Helium MFC set to  0.000000
10/25/2012	10:44:49 AM	H2 MFC set to  0.000000
10/25/2012	10:44:49 AM	BCl3 MFC set to  0.000000
10/25/2012	10:44:49 AM	PH3 MFC set to  0.000000
10/25/2012	10:44:49 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:44:49 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:44:49 AM	Tube furnace set to 0
10/25/2012	10:45:19 AM	H2 valve closed
10/25/2012	10:45:19 AM	BCl3 valve closed
10/25/2012	10:45:19 AM	PH3 valve closed
10/25/2012	10:45:19 AM	SiCl4 pre valve closed
10/25/2012	10:45:19 AM	SiCl4 post valve closed
10/25/2012	10:45:19 AM	Bypass valve closed
10/25/2012	10:45:19 AM	Bubbler valve closed
10/25/2012	10:45:19 AM	Helium valve opened
10/25/2012	10:45:19 AM	Main Vac valve opened
10/25/2012	10:45:19 AM	Helium MFC set to  20.000000
10/25/2012	10:45:19 AM	H2 MFC set to  0.000000
10/25/2012	10:45:19 AM	BCl3 MFC set to  0.000000
10/25/2012	10:45:19 AM	PH3 MFC set to  0.000000
10/25/2012	10:45:19 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:45:19 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:45:19 AM	Tube furnace set to 0
10/25/2012	10:45:50 AM	Helium valve closed
10/25/2012	10:45:50 AM	H2 valve closed
10/25/2012	10:45:50 AM	BCl3 valve closed
10/25/2012	10:45:50 AM	PH3 valve closed
10/25/2012	10:45:50 AM	SiCl4 pre valve closed
10/25/2012	10:45:50 AM	SiCl4 post valve closed
10/25/2012	10:45:50 AM	Bypass valve closed
10/25/2012	10:45:50 AM	Bubbler valve closed
10/25/2012	10:45:50 AM	Main Vac valve opened
10/25/2012	10:45:50 AM	Helium MFC set to  0.000000
10/25/2012	10:45:50 AM	H2 MFC set to  0.000000
10/25/2012	10:45:50 AM	BCl3 MFC set to  0.000000
10/25/2012	10:45:50 AM	PH3 MFC set to  0.000000
10/25/2012	10:45:50 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:45:50 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:45:50 AM	Tube furnace set to 0
10/25/2012	10:46:20 AM	H2 valve closed
10/25/2012	10:46:20 AM	BCl3 valve closed
10/25/2012	10:46:20 AM	PH3 valve closed
10/25/2012	10:46:20 AM	SiCl4 pre valve closed
10/25/2012	10:46:20 AM	SiCl4 post valve closed
10/25/2012	10:46:20 AM	Bypass valve closed
10/25/2012	10:46:20 AM	Bubbler valve closed
10/25/2012	10:46:20 AM	Helium valve opened
10/25/2012	10:46:20 AM	Main Vac valve opened
10/25/2012	10:46:20 AM	Helium MFC set to  20.000000
10/25/2012	10:46:20 AM	H2 MFC set to  0.000000
10/25/2012	10:46:20 AM	BCl3 MFC set to  0.000000
10/25/2012	10:46:20 AM	PH3 MFC set to  0.000000
10/25/2012	10:46:20 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:46:20 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:46:20 AM	Tube furnace set to 0
10/25/2012	10:46:50 AM	Helium valve closed
10/25/2012	10:46:50 AM	H2 valve closed
10/25/2012	10:46:50 AM	BCl3 valve closed
10/25/2012	10:46:50 AM	PH3 valve closed
10/25/2012	10:46:50 AM	SiCl4 pre valve closed
10/25/2012	10:46:50 AM	SiCl4 post valve closed
10/25/2012	10:46:50 AM	Bypass valve closed
10/25/2012	10:46:50 AM	Bubbler valve closed
10/25/2012	10:46:50 AM	Main Vac valve opened
10/25/2012	10:46:50 AM	Helium MFC set to  0.000000
10/25/2012	10:46:50 AM	H2 MFC set to  0.000000
10/25/2012	10:46:50 AM	BCl3 MFC set to  0.000000
10/25/2012	10:46:50 AM	PH3 MFC set to  0.000000
10/25/2012	10:46:50 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:46:50 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:46:50 AM	Tube furnace set to 0
10/25/2012	10:47:20 AM	H2 valve closed
10/25/2012	10:47:20 AM	BCl3 valve closed
10/25/2012	10:47:20 AM	PH3 valve closed
10/25/2012	10:47:20 AM	SiCl4 pre valve closed
10/25/2012	10:47:20 AM	SiCl4 post valve closed
10/25/2012	10:47:20 AM	Bypass valve closed
10/25/2012	10:47:20 AM	Bubbler valve closed
10/25/2012	10:47:20 AM	Helium valve opened
10/25/2012	10:47:20 AM	Main Vac valve opened
10/25/2012	10:47:20 AM	Helium MFC set to  20.000000
10/25/2012	10:47:20 AM	H2 MFC set to  0.000000
10/25/2012	10:47:20 AM	BCl3 MFC set to  0.000000
10/25/2012	10:47:20 AM	PH3 MFC set to  0.000000
10/25/2012	10:47:20 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:47:20 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:47:21 AM	Tube furnace set to 0
10/25/2012	10:47:51 AM	Helium valve closed
10/25/2012	10:47:51 AM	H2 valve closed
10/25/2012	10:47:51 AM	BCl3 valve closed
10/25/2012	10:47:51 AM	PH3 valve closed
10/25/2012	10:47:51 AM	SiCl4 pre valve closed
10/25/2012	10:47:51 AM	SiCl4 post valve closed
10/25/2012	10:47:51 AM	Bypass valve closed
10/25/2012	10:47:51 AM	Bubbler valve closed
10/25/2012	10:47:51 AM	Main Vac valve opened
10/25/2012	10:47:51 AM	Helium MFC set to  0.000000
10/25/2012	10:47:51 AM	H2 MFC set to  0.000000
10/25/2012	10:47:51 AM	BCl3 MFC set to  0.000000
10/25/2012	10:47:51 AM	PH3 MFC set to  0.000000
10/25/2012	10:47:51 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:47:51 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:47:51 AM	Tube furnace set to 0
10/25/2012	10:48:21 AM	H2 valve closed
10/25/2012	10:48:21 AM	BCl3 valve closed
10/25/2012	10:48:21 AM	PH3 valve closed
10/25/2012	10:48:21 AM	SiCl4 pre valve closed
10/25/2012	10:48:21 AM	SiCl4 post valve closed
10/25/2012	10:48:21 AM	Bypass valve closed
10/25/2012	10:48:21 AM	Bubbler valve closed
10/25/2012	10:48:21 AM	Helium valve opened
10/25/2012	10:48:21 AM	Main Vac valve opened
10/25/2012	10:48:21 AM	Helium MFC set to  20.000000
10/25/2012	10:48:21 AM	H2 MFC set to  0.000000
10/25/2012	10:48:21 AM	BCl3 MFC set to  0.000000
10/25/2012	10:48:21 AM	PH3 MFC set to  0.000000
10/25/2012	10:48:21 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:48:21 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:48:21 AM	Tube furnace set to 0
10/25/2012	10:48:51 AM	Helium valve closed
10/25/2012	10:48:51 AM	H2 valve closed
10/25/2012	10:48:51 AM	BCl3 valve closed
10/25/2012	10:48:51 AM	PH3 valve closed
10/25/2012	10:48:51 AM	SiCl4 pre valve closed
10/25/2012	10:48:51 AM	SiCl4 post valve closed
10/25/2012	10:48:51 AM	Bypass valve closed
10/25/2012	10:48:51 AM	Bubbler valve closed
10/25/2012	10:48:51 AM	Main Vac valve opened
10/25/2012	10:48:51 AM	Helium MFC set to  0.000000
10/25/2012	10:48:51 AM	H2 MFC set to  0.000000
10/25/2012	10:48:51 AM	BCl3 MFC set to  0.000000
10/25/2012	10:48:51 AM	PH3 MFC set to  0.000000
10/25/2012	10:48:51 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:48:51 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:48:51 AM	Tube furnace set to 0
10/25/2012	10:49:21 AM	H2 valve closed
10/25/2012	10:49:21 AM	BCl3 valve closed
10/25/2012	10:49:21 AM	PH3 valve closed
10/25/2012	10:49:21 AM	SiCl4 pre valve closed
10/25/2012	10:49:21 AM	SiCl4 post valve closed
10/25/2012	10:49:21 AM	Bypass valve closed
10/25/2012	10:49:21 AM	Bubbler valve closed
10/25/2012	10:49:21 AM	Helium valve opened
10/25/2012	10:49:21 AM	Main Vac valve opened
10/25/2012	10:49:21 AM	Helium MFC set to  20.000000
10/25/2012	10:49:21 AM	H2 MFC set to  0.000000
10/25/2012	10:49:21 AM	BCl3 MFC set to  0.000000
10/25/2012	10:49:21 AM	PH3 MFC set to  0.000000
10/25/2012	10:49:21 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:49:21 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:49:21 AM	Tube furnace set to 0
10/25/2012	10:49:52 AM	Helium valve closed
10/25/2012	10:49:52 AM	H2 valve closed
10/25/2012	10:49:52 AM	BCl3 valve closed
10/25/2012	10:49:52 AM	PH3 valve closed
10/25/2012	10:49:52 AM	SiCl4 pre valve closed
10/25/2012	10:49:52 AM	SiCl4 post valve closed
10/25/2012	10:49:52 AM	Bypass valve closed
10/25/2012	10:49:52 AM	Bubbler valve closed
10/25/2012	10:49:52 AM	Main Vac valve opened
10/25/2012	10:49:52 AM	Helium MFC set to  0.000000
10/25/2012	10:49:52 AM	H2 MFC set to  0.000000
10/25/2012	10:49:52 AM	BCl3 MFC set to  0.000000
10/25/2012	10:49:52 AM	PH3 MFC set to  0.000000
10/25/2012	10:49:52 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:49:52 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:49:52 AM	Tube furnace set to 0
10/25/2012	10:49:53 AM	Run finished at 10:49 AM
10/25/2012	10:49:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/25/2012	10:54:59 AM	Recipe started at 10:54 AM
10/25/2012	10:54:59 AM	Helium valve closed
10/25/2012	10:54:59 AM	H2 valve closed
10/25/2012	10:54:59 AM	BCl3 valve closed
10/25/2012	10:54:59 AM	PH3 valve closed
10/25/2012	10:54:59 AM	SiCl4 pre valve closed
10/25/2012	10:54:59 AM	SiCl4 post valve closed
10/25/2012	10:54:59 AM	Main Vac valve closed
10/25/2012	10:54:59 AM	Bypass valve closed
10/25/2012	10:54:59 AM	Bubbler valve closed
10/25/2012	10:54:59 AM	Helium MFC set to  0.000000
10/25/2012	10:54:59 AM	H2 MFC set to  0.000000
10/25/2012	10:54:59 AM	BCl3 MFC set to  0.000000
10/25/2012	10:54:59 AM	PH3 MFC set to  0.000000
10/25/2012	10:54:59 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:54:59 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:54:59 AM	Tube furnace set to 0
10/25/2012	10:55:02 AM	Helium valve closed
10/25/2012	10:55:02 AM	BCl3 valve closed
10/25/2012	10:55:02 AM	PH3 valve closed
10/25/2012	10:55:02 AM	SiCl4 pre valve closed
10/25/2012	10:55:02 AM	SiCl4 post valve closed
10/25/2012	10:55:02 AM	Main Vac valve closed
10/25/2012	10:55:02 AM	Bypass valve closed
10/25/2012	10:55:02 AM	Bubbler valve closed
10/25/2012	10:55:02 AM	H2 valve opened
10/25/2012	10:55:02 AM	Helium MFC set to  0.000000
10/25/2012	10:55:02 AM	H2 MFC set to  500.000000
10/25/2012	10:55:02 AM	BCl3 MFC set to  0.000000
10/25/2012	10:55:02 AM	PH3 MFC set to  0.000000
10/25/2012	10:55:02 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:55:02 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:55:02 AM	Tube furnace set to 50
10/25/2012	10:56:17 AM	Helium valve closed
10/25/2012	10:56:17 AM	BCl3 valve closed
10/25/2012	10:56:17 AM	PH3 valve closed
10/25/2012	10:56:17 AM	SiCl4 pre valve closed
10/25/2012	10:56:17 AM	SiCl4 post valve closed
10/25/2012	10:56:17 AM	Main Vac valve closed
10/25/2012	10:56:17 AM	Bypass valve closed
10/25/2012	10:56:17 AM	H2 valve opened
10/25/2012	10:56:17 AM	Bubbler valve opened
10/25/2012	10:56:17 AM	Helium MFC set to  0.000000
10/25/2012	10:56:17 AM	H2 MFC set to  500.000000
10/25/2012	10:56:17 AM	BCl3 MFC set to  0.000000
10/25/2012	10:56:17 AM	PH3 MFC set to  0.000000
10/25/2012	10:56:17 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:56:17 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:56:18 AM	Tube furnace set to 50
10/25/2012	10:56:19 AM	Helium valve closed
10/25/2012	10:56:19 AM	BCl3 valve closed
10/25/2012	10:56:19 AM	PH3 valve closed
10/25/2012	10:56:19 AM	SiCl4 pre valve closed
10/25/2012	10:56:19 AM	SiCl4 post valve closed
10/25/2012	10:56:19 AM	Main Vac valve closed
10/25/2012	10:56:19 AM	Bypass valve closed
10/25/2012	10:56:19 AM	H2 valve opened
10/25/2012	10:56:19 AM	Bubbler valve opened
10/25/2012	10:56:19 AM	Helium MFC set to  0.000000
10/25/2012	10:56:19 AM	H2 MFC set to  500.000000
10/25/2012	10:56:19 AM	BCl3 MFC set to  0.000000
10/25/2012	10:56:19 AM	PH3 MFC set to  0.000000
10/25/2012	10:56:19 AM	SiCl4 MFC set to  0.000000
10/25/2012	10:56:19 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	10:56:19 AM	Tube furnace set to 1000
10/25/2012	11:16:19 AM	Helium valve closed
10/25/2012	11:16:19 AM	BCl3 valve closed
10/25/2012	11:16:19 AM	PH3 valve closed
10/25/2012	11:16:19 AM	Main Vac valve closed
10/25/2012	11:16:19 AM	Bypass valve closed
10/25/2012	11:16:19 AM	H2 valve opened
10/25/2012	11:16:19 AM	SiCl4 pre valve opened
10/25/2012	11:16:19 AM	SiCl4 post valve opened
10/25/2012	11:16:19 AM	Bubbler valve opened
10/25/2012	11:16:19 AM	Helium MFC set to  0.000000
10/25/2012	11:16:19 AM	H2 MFC set to  450.000000
10/25/2012	11:16:19 AM	BCl3 MFC set to  0.000000
10/25/2012	11:16:19 AM	PH3 MFC set to  0.000000
10/25/2012	11:16:19 AM	SiCl4 MFC set to  50.000000
10/25/2012	11:16:19 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	11:16:19 AM	Tube furnace set to 1000
10/25/2012	11:36:19 AM	Helium valve closed
10/25/2012	11:36:19 AM	BCl3 valve closed
10/25/2012	11:36:19 AM	PH3 valve closed
10/25/2012	11:36:19 AM	SiCl4 pre valve closed
10/25/2012	11:36:19 AM	SiCl4 post valve closed
10/25/2012	11:36:19 AM	Main Vac valve closed
10/25/2012	11:36:19 AM	Bypass valve closed
10/25/2012	11:36:19 AM	H2 valve opened
10/25/2012	11:36:19 AM	Bubbler valve opened
10/25/2012	11:36:19 AM	Helium MFC set to  0.000000
10/25/2012	11:36:19 AM	H2 MFC set to  500.000000
10/25/2012	11:36:19 AM	BCl3 MFC set to  0.000000
10/25/2012	11:36:19 AM	PH3 MFC set to  0.000000
10/25/2012	11:36:19 AM	SiCl4 MFC set to  0.000000
10/25/2012	11:36:19 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	11:36:19 AM	Tube furnace set to 950
10/25/2012	11:39:19 AM	Helium valve closed
10/25/2012	11:39:19 AM	BCl3 valve closed
10/25/2012	11:39:19 AM	PH3 valve closed
10/25/2012	11:39:19 AM	SiCl4 pre valve closed
10/25/2012	11:39:19 AM	SiCl4 post valve closed
10/25/2012	11:39:19 AM	Main Vac valve closed
10/25/2012	11:39:19 AM	Bypass valve closed
10/25/2012	11:39:19 AM	H2 valve opened
10/25/2012	11:39:19 AM	Bubbler valve opened
10/25/2012	11:39:19 AM	Helium MFC set to  0.000000
10/25/2012	11:39:19 AM	H2 MFC set to  500.000000
10/25/2012	11:39:19 AM	BCl3 MFC set to  0.000000
10/25/2012	11:39:19 AM	PH3 MFC set to  0.000000
10/25/2012	11:39:19 AM	SiCl4 MFC set to  0.000000
10/25/2012	11:39:19 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	11:39:20 AM	Tube furnace set to 900
10/25/2012	11:42:20 AM	Helium valve closed
10/25/2012	11:42:20 AM	BCl3 valve closed
10/25/2012	11:42:20 AM	PH3 valve closed
10/25/2012	11:42:20 AM	SiCl4 pre valve closed
10/25/2012	11:42:20 AM	SiCl4 post valve closed
10/25/2012	11:42:20 AM	Main Vac valve closed
10/25/2012	11:42:20 AM	Bypass valve closed
10/25/2012	11:42:20 AM	H2 valve opened
10/25/2012	11:42:20 AM	Bubbler valve opened
10/25/2012	11:42:20 AM	Helium MFC set to  0.000000
10/25/2012	11:42:20 AM	H2 MFC set to  500.000000
10/25/2012	11:42:20 AM	BCl3 MFC set to  0.000000
10/25/2012	11:42:20 AM	PH3 MFC set to  0.000000
10/25/2012	11:42:20 AM	SiCl4 MFC set to  0.000000
10/25/2012	11:42:20 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	11:42:20 AM	Tube furnace set to 850
10/25/2012	11:45:20 AM	Helium valve closed
10/25/2012	11:45:20 AM	BCl3 valve closed
10/25/2012	11:45:20 AM	PH3 valve closed
10/25/2012	11:45:20 AM	SiCl4 pre valve closed
10/25/2012	11:45:20 AM	SiCl4 post valve closed
10/25/2012	11:45:20 AM	Main Vac valve closed
10/25/2012	11:45:20 AM	Bypass valve closed
10/25/2012	11:45:20 AM	H2 valve opened
10/25/2012	11:45:20 AM	Bubbler valve opened
10/25/2012	11:45:20 AM	Helium MFC set to  0.000000
10/25/2012	11:45:20 AM	H2 MFC set to  500.000000
10/25/2012	11:45:20 AM	BCl3 MFC set to  0.000000
10/25/2012	11:45:20 AM	PH3 MFC set to  0.000000
10/25/2012	11:45:20 AM	SiCl4 MFC set to  0.000000
10/25/2012	11:45:20 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	11:45:20 AM	Tube furnace set to 800
10/25/2012	11:48:20 AM	Helium valve closed
10/25/2012	11:48:20 AM	BCl3 valve closed
10/25/2012	11:48:20 AM	PH3 valve closed
10/25/2012	11:48:20 AM	SiCl4 pre valve closed
10/25/2012	11:48:20 AM	SiCl4 post valve closed
10/25/2012	11:48:20 AM	Main Vac valve closed
10/25/2012	11:48:20 AM	Bypass valve closed
10/25/2012	11:48:20 AM	H2 valve opened
10/25/2012	11:48:20 AM	Bubbler valve opened
10/25/2012	11:48:20 AM	Helium MFC set to  0.000000
10/25/2012	11:48:20 AM	H2 MFC set to  500.000000
10/25/2012	11:48:20 AM	BCl3 MFC set to  0.000000
10/25/2012	11:48:20 AM	PH3 MFC set to  0.000000
10/25/2012	11:48:20 AM	SiCl4 MFC set to  0.000000
10/25/2012	11:48:20 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	11:48:20 AM	Tube furnace set to 750
10/25/2012	11:51:20 AM	H2 valve closed
10/25/2012	11:51:20 AM	BCl3 valve closed
10/25/2012	11:51:20 AM	PH3 valve closed
10/25/2012	11:51:20 AM	SiCl4 pre valve closed
10/25/2012	11:51:20 AM	SiCl4 post valve closed
10/25/2012	11:51:20 AM	Main Vac valve closed
10/25/2012	11:51:20 AM	Bypass valve closed
10/25/2012	11:51:20 AM	Helium valve opened
10/25/2012	11:51:20 AM	Bubbler valve opened
10/25/2012	11:51:20 AM	Helium MFC set to  400.000000
10/25/2012	11:51:20 AM	H2 MFC set to  0.000000
10/25/2012	11:51:20 AM	BCl3 MFC set to  0.000000
10/25/2012	11:51:20 AM	PH3 MFC set to  0.000000
10/25/2012	11:51:20 AM	SiCl4 MFC set to  0.000000
10/25/2012	11:51:20 AM	Bypass solenoid MFC set to  0.000000
10/25/2012	11:51:21 AM	Tube furnace set to 0
10/25/2012	12:16:20 PM	Helium valve closed
10/25/2012	12:16:20 PM	H2 valve closed
10/25/2012	12:16:21 PM	BCl3 valve closed
10/25/2012	12:16:21 PM	PH3 valve closed
10/25/2012	12:16:21 PM	SiCl4 pre valve closed
10/25/2012	12:16:21 PM	SiCl4 post valve closed
10/25/2012	12:16:21 PM	Main Vac valve closed
10/25/2012	12:16:21 PM	Bypass valve closed
10/25/2012	12:16:21 PM	Bubbler valve closed
10/25/2012	12:16:21 PM	Helium MFC set to  0.000000
10/25/2012	12:16:21 PM	H2 MFC set to  0.000000
10/25/2012	12:16:21 PM	BCl3 MFC set to  0.000000
10/25/2012	12:16:21 PM	PH3 MFC set to  0.000000
10/25/2012	12:16:21 PM	SiCl4 MFC set to  0.000000
10/25/2012	12:16:21 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	12:16:21 PM	Tube furnace set to 50
10/25/2012	12:21:21 PM	Helium valve closed
10/25/2012	12:21:21 PM	H2 valve closed
10/25/2012	12:21:21 PM	BCl3 valve closed
10/25/2012	12:21:21 PM	PH3 valve closed
10/25/2012	12:21:21 PM	SiCl4 pre valve closed
10/25/2012	12:21:21 PM	SiCl4 post valve closed
10/25/2012	12:21:21 PM	Main Vac valve closed
10/25/2012	12:21:21 PM	Bubbler valve closed
10/25/2012	12:21:21 PM	Bypass valve opened
10/25/2012	12:21:21 PM	Helium MFC set to  0.000000
10/25/2012	12:21:21 PM	H2 MFC set to  0.000000
10/25/2012	12:21:21 PM	BCl3 MFC set to  0.000000
10/25/2012	12:21:21 PM	PH3 MFC set to  0.000000
10/25/2012	12:21:21 PM	SiCl4 MFC set to  0.000000
10/25/2012	12:21:21 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	12:21:21 PM	Tube furnace set to 0
10/25/2012	12:22:23 PM	Helium valve closed
10/25/2012	12:22:23 PM	H2 valve closed
10/25/2012	12:22:24 PM	BCl3 valve closed
10/25/2012	12:22:24 PM	PH3 valve closed
10/25/2012	12:22:24 PM	SiCl4 pre valve closed
10/25/2012	12:22:24 PM	SiCl4 post valve closed
10/25/2012	12:22:24 PM	Bypass valve closed
10/25/2012	12:22:24 PM	Bubbler valve closed
10/25/2012	12:22:24 PM	Main Vac valve opened
10/25/2012	12:22:24 PM	Helium MFC set to  0.000000
10/25/2012	12:22:24 PM	H2 MFC set to  0.000000
10/25/2012	12:22:24 PM	BCl3 MFC set to  0.000000
10/25/2012	12:22:24 PM	PH3 MFC set to  0.000000
10/25/2012	12:22:24 PM	SiCl4 MFC set to  0.000000
10/25/2012	12:22:24 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	12:22:24 PM	Tube furnace set to 0
10/25/2012	12:22:25 PM	Run finished at 12:22 PM
10/25/2012	2:53:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2012	2:53:41 PM	Recipe started at 2:53 PM
10/25/2012	2:53:41 PM	Helium valve closed
10/25/2012	2:53:41 PM	H2 valve closed
10/25/2012	2:53:41 PM	BCl3 valve closed
10/25/2012	2:53:41 PM	PH3 valve closed
10/25/2012	2:53:41 PM	SiCl4 pre valve closed
10/25/2012	2:53:41 PM	SiCl4 post valve closed
10/25/2012	2:53:41 PM	Main Vac valve closed
10/25/2012	2:53:41 PM	Bypass valve closed
10/25/2012	2:53:41 PM	Bubbler valve closed
10/25/2012	2:53:41 PM	Helium MFC set to  0.000000
10/25/2012	2:53:41 PM	H2 MFC set to  0.000000
10/25/2012	2:53:41 PM	BCl3 MFC set to  0.000000
10/25/2012	2:53:41 PM	PH3 MFC set to  0.000000
10/25/2012	2:53:41 PM	SiCl4 MFC set to  0.000000
10/25/2012	2:53:41 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	2:53:41 PM	Tube furnace set to 0
10/25/2012	2:53:44 PM	H2 valve closed
10/25/2012	2:53:44 PM	BCl3 valve closed
10/25/2012	2:53:44 PM	PH3 valve closed
10/25/2012	2:53:44 PM	SiCl4 pre valve closed
10/25/2012	2:53:44 PM	SiCl4 post valve closed
10/25/2012	2:53:44 PM	Main Vac valve closed
10/25/2012	2:53:44 PM	Bypass valve closed
10/25/2012	2:53:44 PM	Bubbler valve closed
10/25/2012	2:53:44 PM	Helium valve opened
10/25/2012	2:53:44 PM	Helium MFC set to  500.000000
10/25/2012	2:53:44 PM	H2 MFC set to  0.000000
10/25/2012	2:53:44 PM	BCl3 MFC set to  0.000000
10/25/2012	2:53:44 PM	PH3 MFC set to  0.000000
10/25/2012	2:53:44 PM	SiCl4 MFC set to  0.000000
10/25/2012	2:53:44 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	2:53:44 PM	Tube furnace set to 0
10/25/2012	2:54:55 PM	Helium valve closed
10/25/2012	2:54:55 PM	H2 valve closed
10/25/2012	2:54:55 PM	BCl3 valve closed
10/25/2012	2:54:55 PM	PH3 valve closed
10/25/2012	2:54:55 PM	SiCl4 pre valve closed
10/25/2012	2:54:55 PM	SiCl4 post valve closed
10/25/2012	2:54:55 PM	Main Vac valve closed
10/25/2012	2:54:55 PM	Bypass valve closed
10/25/2012	2:54:55 PM	Bubbler valve closed
10/25/2012	2:54:55 PM	Helium MFC set to  0.000000
10/25/2012	2:54:55 PM	H2 MFC set to  0.000000
10/25/2012	2:54:55 PM	BCl3 MFC set to  0.000000
10/25/2012	2:54:55 PM	PH3 MFC set to  0.000000
10/25/2012	2:54:55 PM	SiCl4 MFC set to  0.000000
10/25/2012	2:54:55 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	2:54:55 PM	Tube furnace set to 0
10/25/2012	2:54:56 PM	Run finished at 2:54 PM
10/25/2012	2:54:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2012	2:58:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2012	2:58:56 PM	Recipe started at 2:58 PM
10/25/2012	2:58:56 PM	Helium valve closed
10/25/2012	2:58:56 PM	H2 valve closed
10/25/2012	2:58:56 PM	BCl3 valve closed
10/25/2012	2:58:56 PM	PH3 valve closed
10/25/2012	2:58:56 PM	SiCl4 pre valve closed
10/25/2012	2:58:56 PM	SiCl4 post valve closed
10/25/2012	2:58:56 PM	Main Vac valve closed
10/25/2012	2:58:56 PM	Bubbler valve closed
10/25/2012	2:58:56 PM	Bypass valve opened
10/25/2012	2:58:56 PM	Helium MFC set to  0.000000
10/25/2012	2:58:56 PM	H2 MFC set to  0.000000
10/25/2012	2:58:56 PM	BCl3 MFC set to  0.000000
10/25/2012	2:58:56 PM	PH3 MFC set to  0.000000
10/25/2012	2:58:56 PM	SiCl4 MFC set to  0.000000
10/25/2012	2:58:56 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	2:58:56 PM	Tube furnace set to 0
10/25/2012	3:00:20 PM	Helium valve closed
10/25/2012	3:00:20 PM	H2 valve closed
10/25/2012	3:00:20 PM	BCl3 valve closed
10/25/2012	3:00:20 PM	PH3 valve closed
10/25/2012	3:00:20 PM	SiCl4 pre valve closed
10/25/2012	3:00:20 PM	SiCl4 post valve closed
10/25/2012	3:00:20 PM	Main Vac valve closed
10/25/2012	3:00:20 PM	Bubbler valve closed
10/25/2012	3:00:20 PM	Bypass valve opened
10/25/2012	3:00:20 PM	Helium MFC set to  0.000000
10/25/2012	3:00:20 PM	H2 MFC set to  0.000000
10/25/2012	3:00:20 PM	BCl3 MFC set to  0.000000
10/25/2012	3:00:20 PM	PH3 MFC set to  0.000000
10/25/2012	3:00:20 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:00:20 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:00:20 PM	Tube furnace set to 0
10/25/2012	3:01:20 PM	Helium valve closed
10/25/2012	3:01:20 PM	H2 valve closed
10/25/2012	3:01:20 PM	BCl3 valve closed
10/25/2012	3:01:20 PM	PH3 valve closed
10/25/2012	3:01:20 PM	SiCl4 pre valve closed
10/25/2012	3:01:20 PM	SiCl4 post valve closed
10/25/2012	3:01:20 PM	Bypass valve closed
10/25/2012	3:01:20 PM	Bubbler valve closed
10/25/2012	3:01:20 PM	Main Vac valve opened
10/25/2012	3:01:20 PM	Helium MFC set to  0.000000
10/25/2012	3:01:20 PM	H2 MFC set to  0.000000
10/25/2012	3:01:20 PM	BCl3 MFC set to  0.000000
10/25/2012	3:01:20 PM	PH3 MFC set to  0.000000
10/25/2012	3:01:20 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:01:20 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:01:20 PM	Tube furnace set to 0
10/25/2012	3:01:21 PM	Run finished at 3:01 PM
10/25/2012	3:01:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2012	3:30:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2012	3:30:24 PM	Recipe started at 3:30 PM
10/25/2012	3:30:24 PM	Helium valve closed
10/25/2012	3:30:24 PM	H2 valve closed
10/25/2012	3:30:24 PM	BCl3 valve closed
10/25/2012	3:30:24 PM	PH3 valve closed
10/25/2012	3:30:24 PM	SiCl4 pre valve closed
10/25/2012	3:30:24 PM	SiCl4 post valve closed
10/25/2012	3:30:24 PM	Main Vac valve closed
10/25/2012	3:30:24 PM	Bypass valve closed
10/25/2012	3:30:24 PM	Bubbler valve closed
10/25/2012	3:30:24 PM	Helium MFC set to  0.000000
10/25/2012	3:30:24 PM	H2 MFC set to  0.000000
10/25/2012	3:30:24 PM	BCl3 MFC set to  0.000000
10/25/2012	3:30:24 PM	PH3 MFC set to  0.000000
10/25/2012	3:30:24 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:30:24 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:30:24 PM	Tube furnace set to 0
10/25/2012	3:30:27 PM	H2 valve closed
10/25/2012	3:30:27 PM	BCl3 valve closed
10/25/2012	3:30:27 PM	PH3 valve closed
10/25/2012	3:30:27 PM	SiCl4 pre valve closed
10/25/2012	3:30:27 PM	SiCl4 post valve closed
10/25/2012	3:30:27 PM	Main Vac valve closed
10/25/2012	3:30:27 PM	Bypass valve closed
10/25/2012	3:30:27 PM	Bubbler valve closed
10/25/2012	3:30:27 PM	Helium valve opened
10/25/2012	3:30:27 PM	Helium MFC set to  500.000000
10/25/2012	3:30:27 PM	H2 MFC set to  0.000000
10/25/2012	3:30:27 PM	BCl3 MFC set to  0.000000
10/25/2012	3:30:27 PM	PH3 MFC set to  0.000000
10/25/2012	3:30:27 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:30:27 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:30:27 PM	Tube furnace set to 0
10/25/2012	3:31:40 PM	Helium valve closed
10/25/2012	3:31:40 PM	H2 valve closed
10/25/2012	3:31:40 PM	BCl3 valve closed
10/25/2012	3:31:40 PM	PH3 valve closed
10/25/2012	3:31:40 PM	SiCl4 pre valve closed
10/25/2012	3:31:40 PM	SiCl4 post valve closed
10/25/2012	3:31:40 PM	Main Vac valve closed
10/25/2012	3:31:40 PM	Bypass valve closed
10/25/2012	3:31:40 PM	Bubbler valve closed
10/25/2012	3:31:40 PM	Helium MFC set to  0.000000
10/25/2012	3:31:40 PM	H2 MFC set to  0.000000
10/25/2012	3:31:40 PM	BCl3 MFC set to  0.000000
10/25/2012	3:31:40 PM	PH3 MFC set to  0.000000
10/25/2012	3:31:40 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:31:40 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:31:40 PM	Tube furnace set to 0
10/25/2012	3:31:41 PM	Run finished at 3:31 PM
10/25/2012	3:31:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/25/2012	3:33:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2012	3:33:28 PM	Recipe started at 3:33 PM
10/25/2012	3:33:28 PM	Helium valve closed
10/25/2012	3:33:28 PM	H2 valve closed
10/25/2012	3:33:28 PM	BCl3 valve closed
10/25/2012	3:33:28 PM	PH3 valve closed
10/25/2012	3:33:29 PM	SiCl4 pre valve closed
10/25/2012	3:33:29 PM	SiCl4 post valve closed
10/25/2012	3:33:29 PM	Main Vac valve closed
10/25/2012	3:33:29 PM	Bubbler valve closed
10/25/2012	3:33:29 PM	Bypass valve opened
10/25/2012	3:33:29 PM	Helium MFC set to  0.000000
10/25/2012	3:33:29 PM	H2 MFC set to  0.000000
10/25/2012	3:33:29 PM	BCl3 MFC set to  0.000000
10/25/2012	3:33:29 PM	PH3 MFC set to  0.000000
10/25/2012	3:33:29 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:33:29 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:33:29 PM	Tube furnace set to 0
10/25/2012	3:34:49 PM	Helium valve closed
10/25/2012	3:34:49 PM	H2 valve closed
10/25/2012	3:34:49 PM	BCl3 valve closed
10/25/2012	3:34:49 PM	PH3 valve closed
10/25/2012	3:34:49 PM	SiCl4 pre valve closed
10/25/2012	3:34:49 PM	SiCl4 post valve closed
10/25/2012	3:34:49 PM	Main Vac valve closed
10/25/2012	3:34:49 PM	Bubbler valve closed
10/25/2012	3:34:49 PM	Bypass valve opened
10/25/2012	3:34:49 PM	Helium MFC set to  0.000000
10/25/2012	3:34:49 PM	H2 MFC set to  0.000000
10/25/2012	3:34:49 PM	BCl3 MFC set to  0.000000
10/25/2012	3:34:49 PM	PH3 MFC set to  0.000000
10/25/2012	3:34:49 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:34:49 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:34:49 PM	Tube furnace set to 0
10/25/2012	3:35:49 PM	Helium valve closed
10/25/2012	3:35:49 PM	H2 valve closed
10/25/2012	3:35:49 PM	BCl3 valve closed
10/25/2012	3:35:49 PM	PH3 valve closed
10/25/2012	3:35:50 PM	SiCl4 pre valve closed
10/25/2012	3:35:50 PM	SiCl4 post valve closed
10/25/2012	3:35:50 PM	Bypass valve closed
10/25/2012	3:35:50 PM	Bubbler valve closed
10/25/2012	3:35:50 PM	Main Vac valve opened
10/25/2012	3:35:50 PM	Helium MFC set to  0.000000
10/25/2012	3:35:50 PM	H2 MFC set to  0.000000
10/25/2012	3:35:50 PM	BCl3 MFC set to  0.000000
10/25/2012	3:35:50 PM	PH3 MFC set to  0.000000
10/25/2012	3:35:50 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:35:50 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:35:50 PM	Tube furnace set to 0
10/25/2012	3:35:51 PM	Run finished at 3:35 PM
10/25/2012	3:35:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2012	3:36:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/25/2012	3:36:26 PM	Recipe started at 3:36 PM
10/25/2012	3:36:26 PM	Helium valve closed
10/25/2012	3:36:26 PM	H2 valve closed
10/25/2012	3:36:26 PM	BCl3 valve closed
10/25/2012	3:36:26 PM	PH3 valve closed
10/25/2012	3:36:26 PM	SiCl4 pre valve closed
10/25/2012	3:36:26 PM	SiCl4 post valve closed
10/25/2012	3:36:26 PM	Main Vac valve closed
10/25/2012	3:36:26 PM	Bubbler valve closed
10/25/2012	3:36:26 PM	Bypass valve opened
10/25/2012	3:36:26 PM	Helium MFC set to  0.000000
10/25/2012	3:36:26 PM	H2 MFC set to  0.000000
10/25/2012	3:36:26 PM	BCl3 MFC set to  0.000000
10/25/2012	3:36:26 PM	PH3 MFC set to  0.000000
10/25/2012	3:36:26 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:36:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:36:26 PM	Tube furnace set to 0
10/25/2012	3:36:26 PM	Helium valve closed
10/25/2012	3:36:26 PM	H2 valve closed
10/25/2012	3:36:26 PM	BCl3 valve closed
10/25/2012	3:36:26 PM	PH3 valve closed
10/25/2012	3:36:26 PM	SiCl4 pre valve closed
10/25/2012	3:36:26 PM	SiCl4 post valve closed
10/25/2012	3:36:26 PM	Main Vac valve closed
10/25/2012	3:36:26 PM	Bubbler valve closed
10/25/2012	3:36:26 PM	Bypass valve opened
10/25/2012	3:36:26 PM	Helium MFC set to  0.000000
10/25/2012	3:36:26 PM	H2 MFC set to  0.000000
10/25/2012	3:36:26 PM	BCl3 MFC set to  0.000000
10/25/2012	3:36:26 PM	PH3 MFC set to  0.000000
10/25/2012	3:36:26 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:36:26 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:36:27 PM	Tube furnace set to 0
10/25/2012	3:36:57 PM	Helium valve closed
10/25/2012	3:36:57 PM	H2 valve closed
10/25/2012	3:36:57 PM	BCl3 valve closed
10/25/2012	3:36:57 PM	PH3 valve closed
10/25/2012	3:36:57 PM	SiCl4 pre valve closed
10/25/2012	3:36:57 PM	SiCl4 post valve closed
10/25/2012	3:36:57 PM	Bypass valve closed
10/25/2012	3:36:57 PM	Bubbler valve closed
10/25/2012	3:36:57 PM	Main Vac valve opened
10/25/2012	3:36:57 PM	Helium MFC set to  0.000000
10/25/2012	3:36:57 PM	H2 MFC set to  0.000000
10/25/2012	3:36:57 PM	BCl3 MFC set to  0.000000
10/25/2012	3:36:57 PM	PH3 MFC set to  0.000000
10/25/2012	3:36:57 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:36:57 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:36:57 PM	Tube furnace set to 0
10/25/2012	3:37:27 PM	H2 valve closed
10/25/2012	3:37:27 PM	BCl3 valve closed
10/25/2012	3:37:27 PM	PH3 valve closed
10/25/2012	3:37:27 PM	SiCl4 pre valve closed
10/25/2012	3:37:27 PM	SiCl4 post valve closed
10/25/2012	3:37:27 PM	Bypass valve closed
10/25/2012	3:37:27 PM	Bubbler valve closed
10/25/2012	3:37:27 PM	Helium valve opened
10/25/2012	3:37:27 PM	Main Vac valve opened
10/25/2012	3:37:27 PM	Helium MFC set to  20.000000
10/25/2012	3:37:27 PM	H2 MFC set to  0.000000
10/25/2012	3:37:27 PM	BCl3 MFC set to  0.000000
10/25/2012	3:37:27 PM	PH3 MFC set to  0.000000
10/25/2012	3:37:27 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:37:27 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:37:27 PM	Tube furnace set to 0
10/25/2012	3:37:57 PM	Helium valve closed
10/25/2012	3:37:57 PM	H2 valve closed
10/25/2012	3:37:57 PM	BCl3 valve closed
10/25/2012	3:37:57 PM	PH3 valve closed
10/25/2012	3:37:57 PM	SiCl4 pre valve closed
10/25/2012	3:37:57 PM	SiCl4 post valve closed
10/25/2012	3:37:57 PM	Bypass valve closed
10/25/2012	3:37:57 PM	Bubbler valve closed
10/25/2012	3:37:57 PM	Main Vac valve opened
10/25/2012	3:37:57 PM	Helium MFC set to  0.000000
10/25/2012	3:37:57 PM	H2 MFC set to  0.000000
10/25/2012	3:37:57 PM	BCl3 MFC set to  0.000000
10/25/2012	3:37:57 PM	PH3 MFC set to  0.000000
10/25/2012	3:37:57 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:37:57 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:37:57 PM	Tube furnace set to 0
10/25/2012	3:38:27 PM	H2 valve closed
10/25/2012	3:38:27 PM	BCl3 valve closed
10/25/2012	3:38:27 PM	PH3 valve closed
10/25/2012	3:38:27 PM	SiCl4 pre valve closed
10/25/2012	3:38:27 PM	SiCl4 post valve closed
10/25/2012	3:38:27 PM	Bypass valve closed
10/25/2012	3:38:27 PM	Bubbler valve closed
10/25/2012	3:38:27 PM	Helium valve opened
10/25/2012	3:38:27 PM	Main Vac valve opened
10/25/2012	3:38:27 PM	Helium MFC set to  20.000000
10/25/2012	3:38:27 PM	H2 MFC set to  0.000000
10/25/2012	3:38:27 PM	BCl3 MFC set to  0.000000
10/25/2012	3:38:27 PM	PH3 MFC set to  0.000000
10/25/2012	3:38:27 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:38:27 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:38:28 PM	Tube furnace set to 0
10/25/2012	3:38:58 PM	Helium valve closed
10/25/2012	3:38:58 PM	H2 valve closed
10/25/2012	3:38:58 PM	BCl3 valve closed
10/25/2012	3:38:58 PM	PH3 valve closed
10/25/2012	3:38:58 PM	SiCl4 pre valve closed
10/25/2012	3:38:58 PM	SiCl4 post valve closed
10/25/2012	3:38:58 PM	Bypass valve closed
10/25/2012	3:38:58 PM	Bubbler valve closed
10/25/2012	3:38:58 PM	Main Vac valve opened
10/25/2012	3:38:58 PM	Helium MFC set to  0.000000
10/25/2012	3:38:58 PM	H2 MFC set to  0.000000
10/25/2012	3:38:58 PM	BCl3 MFC set to  0.000000
10/25/2012	3:38:58 PM	PH3 MFC set to  0.000000
10/25/2012	3:38:58 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:38:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:38:58 PM	Tube furnace set to 0
10/25/2012	3:39:28 PM	H2 valve closed
10/25/2012	3:39:28 PM	BCl3 valve closed
10/25/2012	3:39:28 PM	PH3 valve closed
10/25/2012	3:39:28 PM	SiCl4 pre valve closed
10/25/2012	3:39:28 PM	SiCl4 post valve closed
10/25/2012	3:39:28 PM	Bypass valve closed
10/25/2012	3:39:28 PM	Bubbler valve closed
10/25/2012	3:39:28 PM	Helium valve opened
10/25/2012	3:39:28 PM	Main Vac valve opened
10/25/2012	3:39:28 PM	Helium MFC set to  20.000000
10/25/2012	3:39:28 PM	H2 MFC set to  0.000000
10/25/2012	3:39:28 PM	BCl3 MFC set to  0.000000
10/25/2012	3:39:28 PM	PH3 MFC set to  0.000000
10/25/2012	3:39:28 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:39:28 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:39:28 PM	Tube furnace set to 0
10/25/2012	3:39:58 PM	Helium valve closed
10/25/2012	3:39:58 PM	H2 valve closed
10/25/2012	3:39:58 PM	BCl3 valve closed
10/25/2012	3:39:58 PM	PH3 valve closed
10/25/2012	3:39:58 PM	SiCl4 pre valve closed
10/25/2012	3:39:58 PM	SiCl4 post valve closed
10/25/2012	3:39:58 PM	Bypass valve closed
10/25/2012	3:39:58 PM	Bubbler valve closed
10/25/2012	3:39:58 PM	Main Vac valve opened
10/25/2012	3:39:58 PM	Helium MFC set to  0.000000
10/25/2012	3:39:58 PM	H2 MFC set to  0.000000
10/25/2012	3:39:58 PM	BCl3 MFC set to  0.000000
10/25/2012	3:39:58 PM	PH3 MFC set to  0.000000
10/25/2012	3:39:58 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:39:58 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:39:58 PM	Tube furnace set to 0
10/25/2012	3:40:28 PM	H2 valve closed
10/25/2012	3:40:28 PM	BCl3 valve closed
10/25/2012	3:40:28 PM	PH3 valve closed
10/25/2012	3:40:28 PM	SiCl4 pre valve closed
10/25/2012	3:40:28 PM	SiCl4 post valve closed
10/25/2012	3:40:28 PM	Bypass valve closed
10/25/2012	3:40:28 PM	Bubbler valve closed
10/25/2012	3:40:28 PM	Helium valve opened
10/25/2012	3:40:28 PM	Main Vac valve opened
10/25/2012	3:40:28 PM	Helium MFC set to  20.000000
10/25/2012	3:40:28 PM	H2 MFC set to  0.000000
10/25/2012	3:40:28 PM	BCl3 MFC set to  0.000000
10/25/2012	3:40:28 PM	PH3 MFC set to  0.000000
10/25/2012	3:40:28 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:40:28 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:40:29 PM	Tube furnace set to 0
10/25/2012	3:40:59 PM	Helium valve closed
10/25/2012	3:40:59 PM	H2 valve closed
10/25/2012	3:40:59 PM	BCl3 valve closed
10/25/2012	3:40:59 PM	PH3 valve closed
10/25/2012	3:40:59 PM	SiCl4 pre valve closed
10/25/2012	3:40:59 PM	SiCl4 post valve closed
10/25/2012	3:40:59 PM	Bypass valve closed
10/25/2012	3:40:59 PM	Bubbler valve closed
10/25/2012	3:40:59 PM	Main Vac valve opened
10/25/2012	3:40:59 PM	Helium MFC set to  0.000000
10/25/2012	3:40:59 PM	H2 MFC set to  0.000000
10/25/2012	3:40:59 PM	BCl3 MFC set to  0.000000
10/25/2012	3:40:59 PM	PH3 MFC set to  0.000000
10/25/2012	3:40:59 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:40:59 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:40:59 PM	Tube furnace set to 0
10/25/2012	3:41:29 PM	H2 valve closed
10/25/2012	3:41:29 PM	BCl3 valve closed
10/25/2012	3:41:29 PM	PH3 valve closed
10/25/2012	3:41:29 PM	SiCl4 pre valve closed
10/25/2012	3:41:29 PM	SiCl4 post valve closed
10/25/2012	3:41:29 PM	Bypass valve closed
10/25/2012	3:41:29 PM	Bubbler valve closed
10/25/2012	3:41:29 PM	Helium valve opened
10/25/2012	3:41:29 PM	Main Vac valve opened
10/25/2012	3:41:29 PM	Helium MFC set to  20.000000
10/25/2012	3:41:29 PM	H2 MFC set to  0.000000
10/25/2012	3:41:29 PM	BCl3 MFC set to  0.000000
10/25/2012	3:41:29 PM	PH3 MFC set to  0.000000
10/25/2012	3:41:29 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:41:29 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:41:29 PM	Tube furnace set to 0
10/25/2012	3:41:59 PM	Helium valve closed
10/25/2012	3:41:59 PM	H2 valve closed
10/25/2012	3:41:59 PM	BCl3 valve closed
10/25/2012	3:41:59 PM	PH3 valve closed
10/25/2012	3:41:59 PM	SiCl4 pre valve closed
10/25/2012	3:41:59 PM	SiCl4 post valve closed
10/25/2012	3:41:59 PM	Bypass valve closed
10/25/2012	3:41:59 PM	Bubbler valve closed
10/25/2012	3:41:59 PM	Main Vac valve opened
10/25/2012	3:41:59 PM	Helium MFC set to  0.000000
10/25/2012	3:41:59 PM	H2 MFC set to  0.000000
10/25/2012	3:41:59 PM	BCl3 MFC set to  0.000000
10/25/2012	3:41:59 PM	PH3 MFC set to  0.000000
10/25/2012	3:41:59 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:41:59 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:41:59 PM	Tube furnace set to 0
10/25/2012	3:42:29 PM	H2 valve closed
10/25/2012	3:42:29 PM	BCl3 valve closed
10/25/2012	3:42:29 PM	PH3 valve closed
10/25/2012	3:42:29 PM	SiCl4 pre valve closed
10/25/2012	3:42:29 PM	SiCl4 post valve closed
10/25/2012	3:42:29 PM	Bypass valve closed
10/25/2012	3:42:29 PM	Bubbler valve closed
10/25/2012	3:42:29 PM	Helium valve opened
10/25/2012	3:42:29 PM	Main Vac valve opened
10/25/2012	3:42:29 PM	Helium MFC set to  20.000000
10/25/2012	3:42:29 PM	H2 MFC set to  0.000000
10/25/2012	3:42:29 PM	BCl3 MFC set to  0.000000
10/25/2012	3:42:29 PM	PH3 MFC set to  0.000000
10/25/2012	3:42:29 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:42:29 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:42:30 PM	Tube furnace set to 0
10/25/2012	3:43:00 PM	Helium valve closed
10/25/2012	3:43:00 PM	H2 valve closed
10/25/2012	3:43:00 PM	BCl3 valve closed
10/25/2012	3:43:00 PM	PH3 valve closed
10/25/2012	3:43:00 PM	SiCl4 pre valve closed
10/25/2012	3:43:00 PM	SiCl4 post valve closed
10/25/2012	3:43:00 PM	Bypass valve closed
10/25/2012	3:43:00 PM	Bubbler valve closed
10/25/2012	3:43:00 PM	Main Vac valve opened
10/25/2012	3:43:00 PM	Helium MFC set to  0.000000
10/25/2012	3:43:00 PM	H2 MFC set to  0.000000
10/25/2012	3:43:00 PM	BCl3 MFC set to  0.000000
10/25/2012	3:43:00 PM	PH3 MFC set to  0.000000
10/25/2012	3:43:00 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:43:00 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:43:00 PM	Tube furnace set to 0
10/25/2012	3:43:30 PM	H2 valve closed
10/25/2012	3:43:30 PM	BCl3 valve closed
10/25/2012	3:43:30 PM	PH3 valve closed
10/25/2012	3:43:30 PM	SiCl4 pre valve closed
10/25/2012	3:43:30 PM	SiCl4 post valve closed
10/25/2012	3:43:30 PM	Bypass valve closed
10/25/2012	3:43:30 PM	Bubbler valve closed
10/25/2012	3:43:30 PM	Helium valve opened
10/25/2012	3:43:30 PM	Main Vac valve opened
10/25/2012	3:43:30 PM	Helium MFC set to  20.000000
10/25/2012	3:43:30 PM	H2 MFC set to  0.000000
10/25/2012	3:43:30 PM	BCl3 MFC set to  0.000000
10/25/2012	3:43:30 PM	PH3 MFC set to  0.000000
10/25/2012	3:43:30 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:43:30 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:43:30 PM	Tube furnace set to 0
10/25/2012	3:44:00 PM	Helium valve closed
10/25/2012	3:44:00 PM	H2 valve closed
10/25/2012	3:44:00 PM	BCl3 valve closed
10/25/2012	3:44:00 PM	PH3 valve closed
10/25/2012	3:44:00 PM	SiCl4 pre valve closed
10/25/2012	3:44:00 PM	SiCl4 post valve closed
10/25/2012	3:44:00 PM	Bypass valve closed
10/25/2012	3:44:00 PM	Bubbler valve closed
10/25/2012	3:44:00 PM	Main Vac valve opened
10/25/2012	3:44:00 PM	Helium MFC set to  0.000000
10/25/2012	3:44:00 PM	H2 MFC set to  0.000000
10/25/2012	3:44:00 PM	BCl3 MFC set to  0.000000
10/25/2012	3:44:00 PM	PH3 MFC set to  0.000000
10/25/2012	3:44:00 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:44:00 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:44:00 PM	Tube furnace set to 0
10/25/2012	3:44:30 PM	H2 valve closed
10/25/2012	3:44:30 PM	BCl3 valve closed
10/25/2012	3:44:30 PM	PH3 valve closed
10/25/2012	3:44:30 PM	SiCl4 pre valve closed
10/25/2012	3:44:30 PM	SiCl4 post valve closed
10/25/2012	3:44:30 PM	Bypass valve closed
10/25/2012	3:44:30 PM	Bubbler valve closed
10/25/2012	3:44:30 PM	Helium valve opened
10/25/2012	3:44:30 PM	Main Vac valve opened
10/25/2012	3:44:30 PM	Helium MFC set to  20.000000
10/25/2012	3:44:30 PM	H2 MFC set to  0.000000
10/25/2012	3:44:30 PM	BCl3 MFC set to  0.000000
10/25/2012	3:44:30 PM	PH3 MFC set to  0.000000
10/25/2012	3:44:30 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:44:30 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:44:31 PM	Tube furnace set to 0
10/25/2012	3:45:01 PM	Helium valve closed
10/25/2012	3:45:01 PM	H2 valve closed
10/25/2012	3:45:01 PM	BCl3 valve closed
10/25/2012	3:45:01 PM	PH3 valve closed
10/25/2012	3:45:01 PM	SiCl4 pre valve closed
10/25/2012	3:45:01 PM	SiCl4 post valve closed
10/25/2012	3:45:01 PM	Bypass valve closed
10/25/2012	3:45:01 PM	Bubbler valve closed
10/25/2012	3:45:01 PM	Main Vac valve opened
10/25/2012	3:45:01 PM	Helium MFC set to  0.000000
10/25/2012	3:45:01 PM	H2 MFC set to  0.000000
10/25/2012	3:45:01 PM	BCl3 MFC set to  0.000000
10/25/2012	3:45:01 PM	PH3 MFC set to  0.000000
10/25/2012	3:45:01 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:45:01 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:45:01 PM	Tube furnace set to 0
10/25/2012	3:45:31 PM	H2 valve closed
10/25/2012	3:45:31 PM	BCl3 valve closed
10/25/2012	3:45:31 PM	PH3 valve closed
10/25/2012	3:45:31 PM	SiCl4 pre valve closed
10/25/2012	3:45:31 PM	SiCl4 post valve closed
10/25/2012	3:45:31 PM	Bypass valve closed
10/25/2012	3:45:31 PM	Bubbler valve closed
10/25/2012	3:45:31 PM	Helium valve opened
10/25/2012	3:45:31 PM	Main Vac valve opened
10/25/2012	3:45:31 PM	Helium MFC set to  20.000000
10/25/2012	3:45:31 PM	H2 MFC set to  0.000000
10/25/2012	3:45:31 PM	BCl3 MFC set to  0.000000
10/25/2012	3:45:31 PM	PH3 MFC set to  0.000000
10/25/2012	3:45:31 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:45:31 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:45:31 PM	Tube furnace set to 0
10/25/2012	3:46:01 PM	Helium valve closed
10/25/2012	3:46:01 PM	H2 valve closed
10/25/2012	3:46:01 PM	BCl3 valve closed
10/25/2012	3:46:01 PM	PH3 valve closed
10/25/2012	3:46:01 PM	SiCl4 pre valve closed
10/25/2012	3:46:01 PM	SiCl4 post valve closed
10/25/2012	3:46:01 PM	Bypass valve closed
10/25/2012	3:46:01 PM	Bubbler valve closed
10/25/2012	3:46:01 PM	Main Vac valve opened
10/25/2012	3:46:01 PM	Helium MFC set to  0.000000
10/25/2012	3:46:01 PM	H2 MFC set to  0.000000
10/25/2012	3:46:01 PM	BCl3 MFC set to  0.000000
10/25/2012	3:46:01 PM	PH3 MFC set to  0.000000
10/25/2012	3:46:01 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:46:01 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:46:01 PM	Tube furnace set to 0
10/25/2012	3:46:31 PM	H2 valve closed
10/25/2012	3:46:31 PM	BCl3 valve closed
10/25/2012	3:46:31 PM	PH3 valve closed
10/25/2012	3:46:31 PM	SiCl4 pre valve closed
10/25/2012	3:46:31 PM	SiCl4 post valve closed
10/25/2012	3:46:31 PM	Bypass valve closed
10/25/2012	3:46:31 PM	Bubbler valve closed
10/25/2012	3:46:31 PM	Helium valve opened
10/25/2012	3:46:31 PM	Main Vac valve opened
10/25/2012	3:46:31 PM	Helium MFC set to  20.000000
10/25/2012	3:46:31 PM	H2 MFC set to  0.000000
10/25/2012	3:46:31 PM	BCl3 MFC set to  0.000000
10/25/2012	3:46:31 PM	PH3 MFC set to  0.000000
10/25/2012	3:46:31 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:46:31 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:46:32 PM	Tube furnace set to 0
10/25/2012	3:47:02 PM	Helium valve closed
10/25/2012	3:47:02 PM	H2 valve closed
10/25/2012	3:47:02 PM	BCl3 valve closed
10/25/2012	3:47:02 PM	PH3 valve closed
10/25/2012	3:47:02 PM	SiCl4 pre valve closed
10/25/2012	3:47:02 PM	SiCl4 post valve closed
10/25/2012	3:47:02 PM	Bypass valve closed
10/25/2012	3:47:02 PM	Bubbler valve closed
10/25/2012	3:47:02 PM	Main Vac valve opened
10/25/2012	3:47:02 PM	Helium MFC set to  0.000000
10/25/2012	3:47:02 PM	H2 MFC set to  0.000000
10/25/2012	3:47:02 PM	BCl3 MFC set to  0.000000
10/25/2012	3:47:02 PM	PH3 MFC set to  0.000000
10/25/2012	3:47:02 PM	SiCl4 MFC set to  0.000000
10/25/2012	3:47:02 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	3:47:02 PM	Tube furnace set to 0
10/25/2012	3:47:03 PM	Run finished at 3:47 PM
10/25/2012	3:47:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/25/2012	4:04:00 PM	Recipe started at 4:03 PM
10/25/2012	4:04:00 PM	Helium valve closed
10/25/2012	4:04:00 PM	H2 valve closed
10/25/2012	4:04:00 PM	BCl3 valve closed
10/25/2012	4:04:00 PM	PH3 valve closed
10/25/2012	4:04:00 PM	SiCl4 pre valve closed
10/25/2012	4:04:00 PM	SiCl4 post valve closed
10/25/2012	4:04:00 PM	Main Vac valve closed
10/25/2012	4:04:00 PM	Bypass valve closed
10/25/2012	4:04:00 PM	Bubbler valve closed
10/25/2012	4:04:00 PM	Helium MFC set to  0.000000
10/25/2012	4:04:00 PM	H2 MFC set to  0.000000
10/25/2012	4:04:00 PM	BCl3 MFC set to  0.000000
10/25/2012	4:04:00 PM	PH3 MFC set to  0.000000
10/25/2012	4:04:00 PM	SiCl4 MFC set to  0.000000
10/25/2012	4:04:00 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	4:04:00 PM	Tube furnace set to 0
10/25/2012	4:04:03 PM	Helium valve closed
10/25/2012	4:04:03 PM	BCl3 valve closed
10/25/2012	4:04:03 PM	PH3 valve closed
10/25/2012	4:04:03 PM	SiCl4 pre valve closed
10/25/2012	4:04:03 PM	SiCl4 post valve closed
10/25/2012	4:04:03 PM	Main Vac valve closed
10/25/2012	4:04:03 PM	Bypass valve closed
10/25/2012	4:04:03 PM	Bubbler valve closed
10/25/2012	4:04:03 PM	H2 valve opened
10/25/2012	4:04:03 PM	Helium MFC set to  0.000000
10/25/2012	4:04:03 PM	H2 MFC set to  500.000000
10/25/2012	4:04:03 PM	BCl3 MFC set to  0.000000
10/25/2012	4:04:03 PM	PH3 MFC set to  0.000000
10/25/2012	4:04:03 PM	SiCl4 MFC set to  0.000000
10/25/2012	4:04:03 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	4:04:03 PM	Tube furnace set to 0
10/25/2012	4:05:19 PM	Helium valve closed
10/25/2012	4:05:19 PM	BCl3 valve closed
10/25/2012	4:05:19 PM	PH3 valve closed
10/25/2012	4:05:19 PM	SiCl4 pre valve closed
10/25/2012	4:05:19 PM	SiCl4 post valve closed
10/25/2012	4:05:19 PM	Main Vac valve closed
10/25/2012	4:05:19 PM	Bypass valve closed
10/25/2012	4:05:19 PM	H2 valve opened
10/25/2012	4:05:19 PM	Bubbler valve opened
10/25/2012	4:05:19 PM	Helium MFC set to  0.000000
10/25/2012	4:05:19 PM	H2 MFC set to  500.000000
10/25/2012	4:05:19 PM	BCl3 MFC set to  0.000000
10/25/2012	4:05:19 PM	PH3 MFC set to  0.000000
10/25/2012	4:05:19 PM	SiCl4 MFC set to  0.000000
10/25/2012	4:05:19 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	4:05:20 PM	Tube furnace set to 0
10/25/2012	4:05:21 PM	Helium valve closed
10/25/2012	4:05:21 PM	BCl3 valve closed
10/25/2012	4:05:21 PM	PH3 valve closed
10/25/2012	4:05:21 PM	SiCl4 pre valve closed
10/25/2012	4:05:21 PM	SiCl4 post valve closed
10/25/2012	4:05:21 PM	Main Vac valve closed
10/25/2012	4:05:21 PM	Bypass valve closed
10/25/2012	4:05:21 PM	H2 valve opened
10/25/2012	4:05:21 PM	Bubbler valve opened
10/25/2012	4:05:21 PM	Helium MFC set to  0.000000
10/25/2012	4:05:21 PM	H2 MFC set to  500.000000
10/25/2012	4:05:21 PM	BCl3 MFC set to  0.000000
10/25/2012	4:05:21 PM	PH3 MFC set to  0.000000
10/25/2012	4:05:21 PM	SiCl4 MFC set to  0.000000
10/25/2012	4:05:21 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	4:05:21 PM	Tube furnace set to 1000
10/25/2012	4:25:21 PM	Helium valve closed
10/25/2012	4:25:21 PM	PH3 valve closed
10/25/2012	4:25:21 PM	Main Vac valve closed
10/25/2012	4:25:21 PM	Bypass valve closed
10/25/2012	4:25:21 PM	H2 valve opened
10/25/2012	4:25:21 PM	BCl3 valve opened
10/25/2012	4:25:21 PM	SiCl4 pre valve opened
10/25/2012	4:25:21 PM	SiCl4 post valve opened
10/25/2012	4:25:21 PM	Bubbler valve opened
10/25/2012	4:25:21 PM	Helium MFC set to  0.000000
10/25/2012	4:25:21 PM	H2 MFC set to  500.000000
10/25/2012	4:25:21 PM	BCl3 MFC set to  1.000000
10/25/2012	4:25:21 PM	PH3 MFC set to  0.000000
10/25/2012	4:25:21 PM	SiCl4 MFC set to  50.000000
10/25/2012	4:25:21 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	4:25:21 PM	Tube furnace set to 1000
10/25/2012	4:45:21 PM	Helium valve closed
10/25/2012	4:45:21 PM	BCl3 valve closed
10/25/2012	4:45:21 PM	PH3 valve closed
10/25/2012	4:45:21 PM	SiCl4 pre valve closed
10/25/2012	4:45:21 PM	SiCl4 post valve closed
10/25/2012	4:45:21 PM	Main Vac valve closed
10/25/2012	4:45:21 PM	Bypass valve closed
10/25/2012	4:45:21 PM	H2 valve opened
10/25/2012	4:45:21 PM	Bubbler valve opened
10/25/2012	4:45:21 PM	Helium MFC set to  0.000000
10/25/2012	4:45:21 PM	H2 MFC set to  500.000000
10/25/2012	4:45:21 PM	BCl3 MFC set to  0.000000
10/25/2012	4:45:21 PM	PH3 MFC set to  0.000000
10/25/2012	4:45:21 PM	SiCl4 MFC set to  0.000000
10/25/2012	4:45:21 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	4:45:21 PM	Tube furnace set to 750
10/25/2012	4:50:21 PM	H2 valve closed
10/25/2012	4:50:21 PM	BCl3 valve closed
10/25/2012	4:50:21 PM	PH3 valve closed
10/25/2012	4:50:21 PM	SiCl4 pre valve closed
10/25/2012	4:50:21 PM	SiCl4 post valve closed
10/25/2012	4:50:21 PM	Main Vac valve closed
10/25/2012	4:50:21 PM	Bypass valve closed
10/25/2012	4:50:21 PM	Helium valve opened
10/25/2012	4:50:21 PM	Bubbler valve opened
10/25/2012	4:50:21 PM	Helium MFC set to  500.000000
10/25/2012	4:50:21 PM	H2 MFC set to  0.000000
10/25/2012	4:50:21 PM	BCl3 MFC set to  0.000000
10/25/2012	4:50:21 PM	PH3 MFC set to  0.000000
10/25/2012	4:50:21 PM	SiCl4 MFC set to  0.000000
10/25/2012	4:50:21 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	4:50:22 PM	Tube furnace set to 0
10/25/2012	5:10:22 PM	Helium valve closed
10/25/2012	5:10:22 PM	H2 valve closed
10/25/2012	5:10:22 PM	BCl3 valve closed
10/25/2012	5:10:22 PM	PH3 valve closed
10/25/2012	5:10:22 PM	SiCl4 pre valve closed
10/25/2012	5:10:22 PM	SiCl4 post valve closed
10/25/2012	5:10:22 PM	Main Vac valve closed
10/25/2012	5:10:22 PM	Bypass valve closed
10/25/2012	5:10:22 PM	Bubbler valve closed
10/25/2012	5:10:22 PM	Helium MFC set to  0.000000
10/25/2012	5:10:22 PM	H2 MFC set to  0.000000
10/25/2012	5:10:22 PM	BCl3 MFC set to  0.000000
10/25/2012	5:10:22 PM	PH3 MFC set to  0.000000
10/25/2012	5:10:22 PM	SiCl4 MFC set to  0.000000
10/25/2012	5:10:22 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	5:10:22 PM	Tube furnace set to 0
10/25/2012	5:10:23 PM	Run finished at 5:10 PM
10/25/2012	6:18:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/25/2012	6:18:01 PM	Recipe started at 6:18 PM
10/25/2012	6:18:01 PM	Helium valve closed
10/25/2012	6:18:01 PM	H2 valve closed
10/25/2012	6:18:01 PM	BCl3 valve closed
10/25/2012	6:18:01 PM	PH3 valve closed
10/25/2012	6:18:01 PM	SiCl4 pre valve closed
10/25/2012	6:18:01 PM	SiCl4 post valve closed
10/25/2012	6:18:01 PM	Main Vac valve closed
10/25/2012	6:18:01 PM	Bubbler valve closed
10/25/2012	6:18:01 PM	Bypass valve opened
10/25/2012	6:18:01 PM	Helium MFC set to  0.000000
10/25/2012	6:18:01 PM	H2 MFC set to  0.000000
10/25/2012	6:18:01 PM	BCl3 MFC set to  0.000000
10/25/2012	6:18:01 PM	PH3 MFC set to  0.000000
10/25/2012	6:18:01 PM	SiCl4 MFC set to  0.000000
10/25/2012	6:18:01 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	6:18:01 PM	Tube furnace set to 0
10/25/2012	6:19:51 PM	Helium valve closed
10/25/2012	6:19:51 PM	H2 valve closed
10/25/2012	6:19:51 PM	BCl3 valve closed
10/25/2012	6:19:51 PM	PH3 valve closed
10/25/2012	6:19:51 PM	SiCl4 pre valve closed
10/25/2012	6:19:51 PM	SiCl4 post valve closed
10/25/2012	6:19:51 PM	Main Vac valve closed
10/25/2012	6:19:51 PM	Bubbler valve closed
10/25/2012	6:19:51 PM	Bypass valve opened
10/25/2012	6:19:51 PM	Helium MFC set to  0.000000
10/25/2012	6:19:51 PM	H2 MFC set to  0.000000
10/25/2012	6:19:51 PM	BCl3 MFC set to  0.000000
10/25/2012	6:19:51 PM	PH3 MFC set to  0.000000
10/25/2012	6:19:51 PM	SiCl4 MFC set to  0.000000
10/25/2012	6:19:51 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	6:19:51 PM	Tube furnace set to 0
10/25/2012	6:20:51 PM	Helium valve closed
10/25/2012	6:20:51 PM	H2 valve closed
10/25/2012	6:20:51 PM	BCl3 valve closed
10/25/2012	6:20:51 PM	PH3 valve closed
10/25/2012	6:20:51 PM	SiCl4 pre valve closed
10/25/2012	6:20:51 PM	SiCl4 post valve closed
10/25/2012	6:20:51 PM	Bypass valve closed
10/25/2012	6:20:51 PM	Bubbler valve closed
10/25/2012	6:20:51 PM	Main Vac valve opened
10/25/2012	6:20:51 PM	Helium MFC set to  0.000000
10/25/2012	6:20:51 PM	H2 MFC set to  0.000000
10/25/2012	6:20:51 PM	BCl3 MFC set to  0.000000
10/25/2012	6:20:51 PM	PH3 MFC set to  0.000000
10/25/2012	6:20:51 PM	SiCl4 MFC set to  0.000000
10/25/2012	6:20:51 PM	Bypass solenoid MFC set to  0.000000
10/25/2012	6:20:52 PM	Tube furnace set to 0
10/25/2012	6:20:53 PM	Run finished at 6:20 PM
10/25/2012	6:20:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
